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Research of Profile Designing, Processing and Surface Coating on Multi-Stages Roots Pump Rotor
Author: LiuQuanLi
Tutor: BaDeChun
School: Northeastern University
Course: Fluid Machinery and Engineering
Keywords: Dry pumps Roots Type line Machining Coating
CLC: TH38
Type: Master's thesis
Year: 2008
Downloads: 118
Quote: 0
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Abstract
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In the emerging chip semiconductor industry, optical communications components and flat panel monitors and other products of the production process, no oil molecules pumps, cryogenic pumps dry high vacuum pump has been widely used. Dry with these high-grade low-vacuum pump before mating mostly traditional oil-sealed vacuum pumps. To reduce the oil pollution, usually in the high and the low vacuum pump connected in series between the cold trap, but this method can not meet the vacuum requirements of cleanliness. Therefore, the research and development of high performance and low cost, long life, simple structure, high efficiency pumping dry vacuum become now and for quite a long period of vacuum science and technology personnel urgent need to address the problems. Among the dry vacuum pump, a multi-stage Roots type dry vacuum pumps are highly semiconductors, optical devices and other high-tech industries in favor of a positive displacement dry vacuum. This topic around the multi-stage Roots type dry vacuum pump key components - Roots rotor, made the following specific tasks: creating into law by computer simulation of three common Roots Rotor analyzed. Then Involute Rotor design, based on the design of an improved arc-type rotor type line. And through capacity utilization factor and backlash type line distribution and other aspects of the analysis and comparison, the final arc due to improved capacity utilization factor Rotor larger backlash stable distribution, etc., using an improved arc Rotor As a multi-stage Roots pump rotor type line dry. The multi-stage Roots rotor machining method discussed. For a special type of rotor line in drawing CNC wire cutting, lathe processing and 2.5-axis CNC milling machine rotor technology program. In the ordinary lathe rotor designed key processes applied eccentric fixture in 2.5-axis CNC milling machining, through the CATIA software simulation of the rotor machining process. Finally, from the feasibility and processing economy, precision, a comparative analysis of three programs; multistage Roots rotors for surface coating process conducted exploratory research. Samples on the rotor deposited by magnetron sputtering hard corrosion-resistant coating, by adjusting the operating vacuum, argon gas flow rate, the sputtering time and other parameters, for the preparation of a Cr magnetron sputtering process was studied. In testing, the use of standard salt spray test, the rotor for corrosion process before and after treatment were compared corrosion resistance, and hardness before and after film deposition, microstructure, surface roughness, etc. auxiliary research.
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