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The Design and Fabrication of the Reconfigurable Fractal Antenna Integrated with MEMS Switches

Author: WangXiaoLing
Tutor: ZhuShouZheng
School: East China Normal University
Course: Radio Physics
Keywords: Fractal Antenna CPW RF MEMS switches Reconfigurable antenna
CLC: TN821
Type: Master's thesis
Year: 2008
Downloads: 288
Quote: 1
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Abstract


This paper comprehensive study of fractal technology , fractal antennas , RF MEMS switches and integrated MEMS switch reconfigurable fractal antenna problems. With the development of modern communication systems , the increasingly high demand for miniaturization , multi-function antenna . Fractal antenna design based on fractal self-similarity and space-filling characteristics with electrically small , broadband and multi-frequency characteristics . With the development of microelectronics technology , you can create a small loss , high Q value , excellent performance RF MEMS switches . Therefore, the production of the integrated MEMS switch reconfigurable fractal antenna becomes possible. This paper analyzes the characteristics of fractal antenna RF MEMS switches and reconfigurable fractal antenna performance and fabrication , proposed a complete set of integrated MEMS switch using coplanar waveguide fed frequency can be re- structure fractal Antenna production process to produce a dielectric substrate for high-resistivity silicon and quartz reconfigurable fractal antennas . The main innovation of the papers are as follows : 1 RF MEMS switch design , design of a cantilever RF MEMS switches , and school Cleanroom production of microelectronic devices . 2, the design of a frequency in the 20 GHz frequency range within reconfigurable fractal antenna , the fractal antenna Sierpinski fractal and Koch Fractal combination , and using the gradient of CPW fed electrically , may be used concurrently probe testing and SMA test , using a cantilever RF MEMS switch frequency reconstructed using microelectronics fabrication . 3 , a detailed description of the reconfigurable fractal antennas microelectronics fabrication process , on key several reasons and process flow sheet . Finally a test of the S11 parameter when the switch drop - down voltage of the test and the antenna is not biased . This study was supported by the National Natural Science Foundation of China ( 60571064 ) and antenna and microwave Key Laboratory of project funds ( 514,370,201 ) funded .

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Radio equipment,telecommunications equipment > Antenna > Antenna: work principle
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