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The Fabrication Process and Application for Self-support X-ray Optical Elements

Author: XinJiang
Tutor: XuChao;XieChangQing
School: Anhui University
Course: Circuits and Systems
Keywords: X -ray A diffractive optical element Self-supporting grating Filter
CLC: TN605
Type: Master's thesis
Year: 2011
Downloads: 27
Quote: 2
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The x -ray is a very important tool in modern scientific research , in the modern new energy research, and aerospace and other fields have a wide range of applications . Plays a crucial role in the process to achieve the core functions of x - ray , X-ray optical elements . x -ray as a very short wavelength of the electromagnetic wave , its characteristics different familiar with the visible light , corresponding to the x -ray optical element is very special . This article made ??transmissive x-ray optical elements need to have a self-supporting structure , a lot of challenges which the modern nanofabrication process ! This paper studies two X-ray optical elements : one is self-supporting X-ray diffraction grating , after testing the diffraction good performance . Another x - ray diode flat response filter, the element is successfully applied to the relevant units of the inertial confinement fusion research . The main contents include: ( 1) To introduce self-supporting X-ray transmission grating and X-ray diode flat response filter application background in the aerospace and inertial confinement fusion . Corresponding to the x -ray characteristics explain the theoretical knowledge of the x - ray transmission grating and the grating structure parameters required ; structural characteristics of the x - ray diode flat response filter ; well as the challenges posed by modern nanofabrication technology . (2) focus on the high line density self-supporting X-ray transmission grating production process Technical Difficulties : the production of the entire process of x - ray transmission grating self-supporting , and then support thin film technology , micro - plating process , grating lines of the correction process . (3) Details ribs non-periodic self-supporting 33331p/mm X - ray transmission grating production process , the emergence of stiffener for non-periodic background , the specific design of the structure were emphasized . The grating produced in 5nm to 25nm band of the diffraction efficiency of the test . (4) X-ray diode flat response filter specific application background and the entire production process of filter . Filter produced after delivery to partners use results show that the production of the filter fully meet the requirements of the experimental results is very consistent with the theoretical value .

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