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Two-wavelength Holographic Measurement of Surface

Author: WangErWei
Tutor: LiJinHuan
School: Northeast Normal University
Course: Optics
Keywords: Precision measurement Holographic interferometry Surface morphology
CLC: O438.1
Type: Master's thesis
Year: 2010
Downloads: 44
Quote: 0
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Abstract


Precision measurement technology has played a very significant role in the manufacture of high-quality products and high efficiency in the production process , and its growing importance . Optical measurement technique is a non-contact measurement , compared with the traditional contact measurement technology , non-contact measurement with high accuracy and high signal-to-noise ratio , fast dynamic response , good linearity , range , and non-contact , etc. . With interference small differences between compare two smooth surfaces or dislocation is what we are familiar with . For example , if the arms of the Michelson interferometer mirror is not completely vertical , parallel interference fringes will appear in the visual field . At the same token , with a Mach - Zehnder interferometer can measure the slight difference between a smooth spherical processing out with another standard smooth spherical . However , there are two disadvantages in the above method . First , the comparison is carried out between the two surfaces , the surface later shaped small differences in phase for the original shape and position , the above method can not do anything . Secondly, to be compared the two surfaces must be smooth. This paper , we introduce a dual- wavelength holographic interferometry , this method can overcome these two shortcomings . Because the object of comparison is the same surface has two states , and in the shape and position of the surface changes its same partial fine structure remains substantially unchanged , so this method is not necessarily limited to a smooth surface , which applies to a rough diffusing surface . The same time, we use the dual- wavelength holographic method to measure the surface topography , With an uneven surface height distribution fringes emerge through theoretical analysis and experimental verification , which is a feasible methods of measurement with nanometer accuracy .

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CLC: > Mathematical sciences and chemical > Physics > Optics > Information Optics > Holographic optical
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