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Development of a Visual Non-contact Probe

Author: ZhangZuo
Tutor: FanGuangZhao
School: Hefei University of Technology
Course: Precision instruments and machinery
Keywords: Blue-ray DVD pick-up head visual non-contact probe confocal(infinity) optical system astigmatic principle edge signal model
CLC: TN946.5
Type: Master's thesis
Year: 2014
Downloads: 2
Quote: 0
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The high precision measurement of the miniature objects is a challenging task. Thisthesis presents a visual non-contact probe, which is based on the Blue-ray DVD pickuphead. The probe consists of the optical moduleļ¼Œthe measurement module and the CCDcamera. With the CCD camera, the relative relationship between the focused spot andthe measured position can be viewed through the optical system. The main tasks of thisresearch are listed as below:1. The commercial Blue-ray DVD pickup head is modified as the displacementsensor so as to meet the needs of micro displacement measurement.2. The confocal optical system is designed to view the measurement process.Reasonable optical analysis and proper computing are the major work in thedesign.3. The measurement methods based on astigmatism principle and reflected energyare determined. The astigmatism principle is used for vertical measurement. Thedisplacement in Z-axis is measured through calibrating the focus error signal.The reflection energy is used for lateral measurement. Edge signal model isestablished and proper threshold is chosen so that the edge position can bedetermined with the resolution beyond the diffraction limit of conventionaloptics.4. Experiments were carried out on a nanopositioning stage to verify the resolutionand repeatability of the probe. Experimental results show that: the resolution ofheight measurement is less than10nm with the standard deviation22nm; theresolution of edge detection also can be10nm with the standard deviation about40nm.

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