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NCD Coating Deposition on Si3N4 Bearing

Author: YangChun
Tutor: LuWenZhuang；ZuoDunWen
School: Nanjing University of Aeronautics and Astronautics
Course: Mechanical Manufacturing and Automation
Keywords: NCD coating ceramic bearing hot filament CVD Si3N4 temperature field thermal-fluid coupling analysis
CLC: TG174.4
Type: Master's thesis
Year: 2009
Downloads: 40
Quote: 2
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Abstract


Nano-crystalline diamond(NCD) film is an ideal bearing coating, this is attributed to its preeminent mechanical and tribological properties. In this thesis, the temperature field and gas spacial field of HFCVD system were investigated using FEA method. Based on the numerical analysis, a kind of new electrode for growing NCD film on bearings was designed. On the improved equipment, experiments of growing NCD coating were studied.The main work and results are as follows:1. Based on the theory of heat transfer and thermofluid dynamics, the heat exchange process and mass transfer process were investigated. Thermal radiation, surface reaction energy and thermal convention are the factors that influence the substrate temperature. Experiments were conducted to find out the relationship between these factors and substrate temperature.2. Three-dimensional finite element models were built up. The effect of hot filament temperature, substrate-filament distance and the number of filaments was discussed. The uniformity of substrate temperature is very important for NCD coating deposition. Based on the numerical analysis, the process parameters were optimized and uniform substrate temperature was obtained.3. Two-dimensional thermal-fluid coupling finite element model was built up. The effect of inlet gas velocity, position of inlet and inlet-substrate distance was discussed. Based on the numerical analysis, the number of inlets and position of inlets were optimized and uniform gas flow field was obtained.4. Based on the numerical analysis, a kind of new electrode for depositing NCD film on bearing inner ring and outer ring in HFCVD system was designed. After the role of Ar plasma during preparing NCD coating was analyzed, the process of NCD coating deposition with Ar assisted was studied and the films were prepared successfully. The influence of substrate temperature and Ar contents on NCD coating was studied using Raman, SEM, AFM and Nano-indentation.

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CLC: > Industrial Technology > Metallurgy and Metal Craft > Metallurgy and Heat Treatment > Metal corrosion protection,metal surface treatment > Corrosion control and protection > Metal surface protection technology
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