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Influence of Vacuum Annealing Treatment on Microstructure and Properties of the Chromium-Doped Graphite-Like-Carbon Coatings
Author: ZhangBin
Tutor: ShiHuiYing
School: Xi'an University of Technology
Course: Materials Science and Engineering
Keywords: Graphite-like carbon coatings vacuum annealing coating-substrate binding strength microstructure
CLC: TG156.2
Type: Master's thesis
Year: 2009
Downloads: 43
Quote: 1
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Abstract
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Chromium-doped Graphite-like carbon (GLC) films with different Cr content were deposited by closed field unbalanced magnetron sputter iron plating technique in this paper. The films were annealed in the vacuum environment. The performance and microstructure of samples were analysed before and after annealed by the instruments such as XPS, SEM, TEM, XRD, micro-hardness tester, scratcher tester, Pin-on-disc tester and so on. The effect of temperature and Cr content on mechanical and tribological performance of GLC films were also researched in this paper.The results show that the annealing temperature can influence the C bond structure of working layer. The SP2C content increases with rising annealing temperature. It indicates the coating had been translating into graphite state from amorphous carbon with the annealing temperature increase. The annealed in vacuum environment influences the crystal structure of coating. The crystal structure is amorphous state mainly under low temperature. When the temperature is 500℃, it translated into crystal phase such as Cr3C2 from XRD spectrum. The Cr3C2 diffraction intensity enhanced and the crystal phase of Cr23C6 appeared in the same time at 600℃. When the annealing temperature reached 800℃, the main structure of the coating was Cr3C2, Cr23C6 and little CrSi2 phases.The coating hardness increased and later decreased with the rising temperature. It’s the largest microhardness of coating when the temperature is 500℃. The coating hardness was consistent on the whole when Cr target current was 0A and 0.1 A; The adhesion strength of coating-substrate reduced with the annealing temperature increase, but the adhesion strength reduced trend is slow when it’s 0A; When the Cr target current was 0A and 0.1 A, the friction coefficient of coating was first decreased and then increased with the rising temperature, and the coating specific wear rate was increased gradually with the rising temperature; That Cr target current was 0.1 A the friction coefficient curve was stabler than it’s 0A and trend was slowly.
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CLC: > Industrial Technology > Metallurgy and Metal Craft > Metallurgy and Heat Treatment > Heat treatment > Heat treatment process > Annealing
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