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Analysis and H_∞ Robust Control of a Linear Motor Driven System

Author: YuXinLu
Tutor: LiZeXiang
School: Harbin Institute of Technology
Course: Mechanical and Electronic Engineering
Keywords: high speed and high precision force ripple compensation H_∞mixed optimization
CLC: TM359.4
Type: Master's thesis
Year: 2008
Downloads: 98
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Abstract


Linear motor driven system has been found in wire-bonding equipments widely, for its higher speed and acceleration capability comparing with the conventional ball-lead screw driven system. Unfortunately, the linear motor driven system operated at high acceleration is subject to various mechanical uncertainty, and the force ripple of the linear motor also affects the positioning accuracy. In this thesis, the force ripple and system uncertainties are analyzed. The force ripple can be considered composited by the position based force ripple and the others. The position based force ripple was detected and compensated with the assistant of data fitting and position based FFT technique in this thesis, and the other force ripple caused by system uncertainties should be rejection by the robust control scheme. After that, the linear motor system with fore ripple compensation has been identified. Without the low acceleration units the PRBS was adopted as a ideal identification input signal in this thesis. And for representing the system uncertainty, a 5order model was obtained in the identification process. With the high order system model, the robust inner speed controller has been designed using H_∞mixed optimization technology considering for the mechanical uncertainties and the motor manufacture uncertainties. The outer position controller is a PI controller with feedforward compensation for high precision positioning. The result shows that the system can achieve high speed and high precision positioning that is satisfactory for semiconductor equipment. In the conclusion, I give some of my experience on the linear motor application, also, there are lots of work should be deal with in future.

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CLC: > Industrial Technology > Electrotechnical > Motor > A special motor > Linear motor
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