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In the past the past decade , the EBG (Electromagnetic Band-Gap, EBG) structure has become a hot research topic in the field of microwave and millimeter wave , its band gap formation mechanism and applications in various fields of the electromagnetic have been widely theoretical and experimental studies , confirmed its significant role in improving the performance of microwave devices and antennas . Micro-electro-mechanical systems (Micro Electro Mechanical System, MEMS ) development of microelectronics technology based on the emerging discipline of interdisciplinary , microelectronics and machining technology as the basis , ranging from microelectronics, mechanics , mechanics , automatic control , material science and other engineering disciplines . This thesis, starting from the basic microwave circuit , in the study of the the CPW structure model analysis method , the transmission characteristics , carried out a detailed analysis of the equivalent circuit of the dumbbell-shaped CPW structure and classic filter design theory and design methods , proposed the structure of the tunable filter . Secondly, according to the existing process conditions processing manufactured relevant band of the band rejection filter , for the test and the test results are analyzed, tunable microwave filter for future design that the direction of a feasibility .
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