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BST films based research UFPA device unit

Author: MaZuo
Tutor: LiYanRong；WuChuanGui
School: University of Electronic Science and Technology
Course: Materials Science and Engineering
Keywords: BST thin films Pyroelectric Uncooled infrared focal plane arrays Micro-bridge
CLC: TN215
Type: Master's thesis
Year: 2010
Downloads: 54
Quote: 0
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Abstract


In the recent two decades, pyroelectric thin film monolithic uncooled infrared detector non-cooled infrared detector research a major focus. With the pyroelectric thin film materials preparation technology continues to improve, pyroelectric properties of thin film materials have been continuously improved; And with the continuous development and improvement of MEMS technology, pyroelectric thin film monolithic uncooled infrared detector structure optimized, the performance is improved. Making it in the military and civilian market has good prospects to become a hot research extensively at home and abroad. Pyroelectric thin film monolithic uncooled infrared detector is the core component of the pyroelectric thin film monolithic uncooled infrared focal plane array, the array performance is mainly sensitive to heat pyroelectric properties of the materials and their heat-sensitive cell structure affected. Especially for the decreasing size of the detector unit, insulated structural properties of the detector has been greater than pyroelectric sensitive materials. This thesis around BST pyroelectric thin film monolithic uncooled thermal infrared detector structure and preparation process carried out research. On pyroelectric uncooled infrared detector performance is analyzed theoretically, based on the comparison of several commonly used insulation structure detector merits. And then design a composite film support micro-bridge structure dangling. Analysis of the film stress of the film structure of floating, on this basis, and selecting the appropriate stress silicon nitride film thickness as a stress-balancing layer and the support layer. Active area of ??the detector unit 0.0001cm2, microbridge composite film thickness of less than 3um. Study of the detector unit for preparing the desired micro-bridge related processes. Including sensitive pyroelectric thin films prepared by metal electrodes patterned thin films and micro-bridge structure release. Using sophisticated laboratory prepared by RF magnetron sputtering technique with self-buffer layer BST thin films; using stripping technology and DC sputtering of Pt / Ti bottom electrode and the upper electrode NiCr annealing process optimization and the use of low-temperature deposition of Pt / Ti under performance of the electrode; TMAH solution on the body of the etching rate of silicon etching and corrosion of the surface roughness parameters of the respective etching process between, on the basis of optional (NH4) 2S2O8 added in an amount of concentration of 25wt 3g/100ml % TMAH solution of silicon micro-bridge corrosion, corrosion temperature of 80 ℃; designed a bulk silicon substrate corrosion protection during the sensitive element for the protection of the front clamp, combined with the use of special protective colloid, avoiding the long 10 hours TMAH etching solution etching process damage to the sensitive element. Applying the above process ultimately successfully prepared a complete micro-bridge elements, element electrode pattern integrity, sharp edges; etched surface flatness; unconnected part composite film of uniform thickness, the stress value is small, the thickness is less than 3um, to achieve the design requirements. The resulting micro-bridge structure with a complete unit via infrared detector infrared response test system testing. At room temperature, 305K, blackbody temperature 700K, test bias 3V, under the conditions of the modulation frequency 135Hz, the measured effective area of ??0.0001cm2 detecting unit detecting rate 9.67 × 107cmHz1/2W-1.

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Photonics technology,laser technology > Infrared technology and equipment > Infrared detection,infrared detectors
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