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Adhesion Improvement of Cvd Diamond Film by Introducing Cu/cr-diamond Composite Coated Interlayers

Author: HeLiXian
Tutor: QiuWanQi
School: South China University of Technology
Course: Materials Processing Engineering
Keywords: Diamond Hot filament chemical vapor deposition Composite plating Cu-Cr alloys Adhesion properties
CLC: TB383.1
Type: Master's thesis
Year: 2010
Downloads: 88
Quote: 1
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Abstract


CVD diamond film / substrate binding force differential is to limit its application to extended key. Prepared as composite plating, hot filament CVD method, the mosaic structure of diamond film to improve the binding force of the diamond film. Respectively for these diamond film morphology, phase structure, Raman spectra, the film / substrate binding properties and growth process were studied. Reinforcement of composite coatings plated with three different metal alloy plating process were: reinforcement Cu, Cr reinforcement and Cu-Cr alloy reinforced. Using citric acid copper plating of Cu reinforced diamond composite coatings; DMF trivalent chromium plating chromium prepared Cr reinforcement diamond composite coating; fluoroborate system Cu-Cr alloy plating preparation of Cu-Cr alloy diamond composite coating reinforced. Diamond film surface morphology was analyzed by scanning electron microscopy. The studies show that: the CVD deposition temperature has an important influence on the continuity of the deposition of the diamond film, the deposition of diamond under lower deposition temperature faster, are more inclined to form a continuous film. On the sand diamond particles determines the size of the particle size and flatness of the diamond film, the finer diamond particles on the sand particles forming a film is thinner, the film surface is more smooth. XRD analysis showed that the diamond (111) (220) and (311) peaks, wherein the larger the relative intensity of the (111) characteristic peaks. Raman spectroscopy analysis showed that the CVD deposition temperature on the quality of the degree of crystallization of the diamond and non-diamond carbon impurity content has a large influence. Easier to obtain a high-quality, high degree of crystallinity and a low impurity content in the higher temperature of the CVD diamond film. Vickers hardness tester indentation test method for diamond film adhesion properties. The research results show that the Cu-Cr alloy reinforced diamond film has the best film and substrate adhesion properties. Cr CVD process coating generated with C-reactive Cr3C2, Cr3C2 help improve its cohesive force as coating and diamond particles bonded phase. But Cr3C2 is the brittle phase Cr added too much it will cause film adhesion performance degradation. Found in the diamond film growth process: CVD early diamond growth homoepitaxial growth, while also in a heterogeneous coating surface, once the diamond nucleus generation; CVD interim, the surface of the diamond particles, The secondary nuclei produce diamond growth both homoepitaxial growth pattern has secondary nucleation growth pattern.

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CLC: > Industrial Technology > General industrial technology > Materials science and engineering > Special structural materials
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