Dissertation > Excellent graduate degree dissertation topics show

The Key Techniques Research of Polymer Microfluidic Chips Mould for Hot Embossing Molding

Author: XuLongFang
Tutor: ZhangPing
School: Graduate Schoo,Chinese Academy of Sciences
Course: Mechanical Manufacturing and Automation
Keywords: polymer microfluidic chip mould of hot embossing molding UV-LIGA technology ultraviolet thick film lithography micro electroforming
CLC: TG66
Type: Master's thesis
Year: 2010
Downloads: 62
Quote: 0
Read: Download Dissertation

Abstract


Microfabrication techniques are the fundation and precondition of MEMS development.Based on the traditional photolithography and etching process, the new technologies and materials have been widely used in microfabrication with the evolution of microelectronics industry, semiconductor integrated circuit, and precision machinery equipment. The polymer materials have a lot of advantages other materials incomparable, which provided with great market value and potential in non-silicon production for high quality and reasonable price.In the basis of new materials introduction,new process gradually begins to growth.At the same time, Many kinds of polymer processing methods develop quickly.Hot embossing is an effective means of lot size manufacturing with the advantage of operation and controlling simply.The quality of hot embossing mould is the key factor of polymer chips molding seriously influencing microstructure morphology.UV-LIGA technique with low cost is a standardized procedure. It can be used to make metal microstructure widely used and commonly concerned in the microfabrication field.The paper is order to making polymer microfluidic for target based on UV-LIGA.Both ultraviolet thick lithography technology and micro electroforming in UV-LIGA process are the key technologies. They are discussed aiming at fabrication photoresist and metal mould,and the new process is also explored. The paper is organized as following:In the first section,Based on the theoretical analysis,The paper reviews the generation, development and application situation at home and abroad about the ultraviolet thick film lithography technology and micro electroforming process. According to the existing process were discussed, the characteristics and application scope of ultraviolet thick film lithography techniques and micro electroforming are analyzed.In the second section,The principle and process concept involved are discussed through the theoretical analysis of the ultraviolet thick film lithography technology. And the theoretical models are established.The characteristics and lithography technical parameters of thick film photoresist mainly including coating, soft baking, exposure, and development are discussed. The orthogonal test method is used to arrange thick film photolithography experiments on the appropriate working conditions. To get optimized parameters,The results are analyzed through the extreme difference method,which can be applicable to the positive AZ4620 lithography process parameters.In the third section,The condition that the properties of positive photoresist changes at high temperature is verified.The multi-layer photoresist structure is make with the experiment.On the basis of AZ4620 hard baking process,plasma oxygen etching, and thick film ultraviolet lithography technologies are combined to fabricate the photoresist mould with multi-layer structure.In the last section,The foundation of electrochemical study is the theory of electrodeposition ,which is the key factors of micro electroforming.The finite element software simulates the condition of electric field and flow field of electrolytic solution. The current and environmental parameters are adjusted with the help of reasonable control of system parameters and conditions.In the end,the nickel mould is produced.

Related Dissertations

  1. Nickel microlens array mold core micro electroforming process and surface quality,TH74
  2. The Fabrication of MEMS Fuze Safety Device and the Study on Bonding Strength of Electroforming Layer,TJ430.3
  3. SU-8 plastic mold swelling and control the process of isolation belt,TQ153.4
  4. Numerical Simulation of Magnetic Convection Effect during the Micro-electroforming Process,TQ153.4
  5. Process Research on Fabrication of Micro-injection Mold Cavity of Cell Culture Device Based on UV-LIGA Technology,TQ320.662
  6. Research on Process Technology of Micro-Electroforming,TQ153.4
  7. Study on Stress in Micro Electrodeposited Coating and Fabrication of Micro Mould Insert,TQ153.4
  8. Research on Key Technologies of Electrothermally Actuated Compliant Microgripper,TH703
  9. Development of EFAB Set-up and Related Basic Experiments,TQ153.4
  10. The Process Study of Fabricating Micro Gear Cavity Based on Quasi-LIGA and Mold Design,TG66
  11. Research on Manufacturing Technology of Micro Molds for Hot Embossing of Micro Channels in Micro Electroforming,TG249.9
  12. Research on Influences of Microelectroforming Parameters on Mold Quality,TG249.9
  13. Studies on the Fabrication Technology for Producing Nickel Micro-mold by Micro-electroforming,TN405
  14. Research on the Uniformity of Micro-electroforming Devices,TH703
  15. Research on Technology of Permanent Magnetism Materials in Microstructure by Electroforming,TM273
  16. The Design and Fabrication of Chip-based Capillary Electrophoresis by UV-LIGA Technology,TN402
  17. Fabrication of the Metal Micro Screen by Combination of UV-LIGA with Micro Electro-machining Technology,TG661
  18. Fundamental Research on Micro Electroforming of Metal Microstructures by Using A Movable Mask,TQ153.4
  19. Regulation of Microfluids on Microfluidic Chips by Thermal Responsive Poly (N-isopropylacrylamide) Monolithic Plug,O633.22
  20. Several MEMS LIGA process development and related research,TP211.2
  21. Fundamental Research on UV-LIGA-Micro-EDM Technology,TG6661

CLC: > Industrial Technology > Metallurgy and Metal Craft > Metal cutting and machine tools > Special machine tools and processing
© 2012 www.DissertationTopic.Net  Mobile