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Fabrication and Measurement of Ion-exchange Waveguides Based on Glass Films

Author: HeChunMei
Tutor: WangRong
School: Jilin University
Course: Optics
Keywords: Magnetron sputtering. Film Lithography Ion exchange Waveguide
CLC: TN252
Type: Master's thesis
Year: 2011
Downloads: 80
Quote: 1
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Abstract


Integrated optical circuit based on the waveguide phenomena based optoelectronic systems, in this system, the optical waveguide is the main carrier of the transmission signal, the connection between the system's internal device is a connection between the optical fiber and the waveguide, the basic components of the system is light waveguide devices. The waveguide is composed of high refractive index of the waveguide layer and a wave of a lower refractive index than the waveguide core region medium. The essence of the optical waveguide is an optical principle of total reflection of the waveguide core region, a waveguide can be lightwave limit propagated in the waveguide layer. Glass-based ion-exchange optical waveguide devices for its low-loss, and a good match single-mode fiber, and low cost, integrated optical unparalleled importance, utility and commercial value in the field of optical communication greatly application prospects. The waveguide ends produced by traditional glass-based ion-exchange method and the need finely polished, thin film technology and ion exchange wears the optical waveguide, not only eliminates the need for polishing the end face of the waveguide, and the use of the technology can be easily and relatively mature silicon-based thin-film active and passive components to achieve integration. This thesis by magnetron sputtering on a Si02 glass substrate plated BK7 glass film several μm thick as a base, and then on this base 150nm Al film plating, spin coating, photoresist, photolithography, a waveguide pattern, then with the Al film of the etch solution, after opening the window in the Al film, and then removing the resist. Immersing the Al film of the window glass is open 1gAgNO3 3.8gNaNO3 and 15.2gKNO3 mixed salt melt, subjected to ion exchange after 20 minutes at 340 ℃. Will be exchanged on the substrate after the aluminum film is etched away, thereby forming a strip of the wave guide cavity. Under certain conditions, the light passes through this chamber, to achieve by the optically denser medium to the optically thinner medium, a total reflection propagation. The distribution of the refractive index of the waveguide is the optical waveguide is an important feature, planar waveguide refractive index distribution measurement using the the prism coupling principle and improved anti WKB theory BK7 glass film based ion exchange. In addition, the application of optical fiber - waveguide coupling test alignment system and end coupling technology by the near-field mode waveguide transmission spot analysis. In this system on the basis of both end faces of the waveguide, an increase of two identical 3dB coupler, measured BK7 glass film produced based ion exchange loss of the optical waveguide.

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Photonics technology,laser technology > Optical waveguide and integrated optics > Waveguide
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