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Laser interferometer length measuring technique with a non -contact , high-precision , high sensitivity , it is widely used in industrial production , precision machining, industrial inspection, research and other fields . With the rapid development of science and technology , the laser interferometer measurement field length measurement technology put forward higher requirements, such as instrument miniaturization, precision measurement , intelligent measurement. Based on semiconductor lasers, computer technology and virtual instrument technology, this paper presents a semiconductor laser and virtual instrument technology combined laser interferometer length measuring methods and techniques , the method utilizes polarization interferometry and virtual instrument technology to achieve the amount of displacement of the object measurement system configuration simple , high precision , stable performance, intelligent processing advantages . The main work of this paper include : 1. Describes three methods of laser interferometry measuring length , and single-frequency laser interferometer length measuring system theory and development in the world were introduced. 2 is proposed based on semiconductor lasers and virtual instrument technology combined laser interferometer length measuring methods and techniques , and introduces the working principle of the measurement system . Using polarized light interference technology to achieve high-precision displacement measurement using virtual instrument technology to achieve the interference fringes of the collection, processing, and display the results in real time , to obtain high-precision displacement measurement . 3 built a measurement system, through experimental verification of the feasibility of the system and the error analysis . The results show that the measuring range of 200mm , 10μm within the measurement error .
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