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The Production Process Monitoring System Research and Implementation Based on MES Platform

Author: JiaYongQiang
Tutor: LuHongYing
School: Beijing Jiaotong University
Course: Computer technology
Keywords: Manufacturing Execution System CORBA Process Monitoring Semiconductor equipment communication standards
CLC: TP277
Type: Master's thesis
Year: 2011
Downloads: 134
Quote: 1
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Abstract


At present , more and more manufacturing enterprises according to their own business processes through the deployment and implementation of Manufacturing Execution Systems (MES) for production management and increase productivity , and lower process control system (PCS) and the upper enterprise resource planning (ERP) communication of information . Production process monitoring system as an important subsystem in the MES match monitoring of production processes and equipment process parameters , and played an important role in improving equipment capacity , ensure the automatic operation of the equipment . Semiconductor industry on behalf of the industry as the concentration of capital and complex process , relying solely on the presence of artificial production monitoring information less , the error rate is high , and the information lag and other issues , seriously affect device capacity . Therefore , for the semiconductor industry and implement production process monitoring system based on MES platform is very necessary . This paper analyzes the status quo of the semiconductor businesses and business processes of the semiconductor industry , for the drawbacks of traditional semiconductor companies rely solely on the artificial production monitoring , process monitoring system based on MES solutions . Particular industry specific enterprise - oriented status quo for the current MES solutions based on semiconductor equipment communication standard (SECS) device communication information format study format scalability achieved by increasing the information items , and on this basis to optimize the data acquisition module based on the the MES production process monitoring system , to make it compatible with different devices communication format ; through the study of the the MES theory and process management functionality based on MES model , the overall structure of the system is designed , functional modules and system database , and the eventual realization of a prototype system ; through the test to verify the functionality of the system , the efficiency of the semiconductor production process monitoring system applications have been significantly improved , with good economic and social benefits .

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CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation systems > Monitoring, alarm,fault diagnosis system
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