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Higher Order Harmonics Contribution in Metrology Beamline and the Design of Suppression Mirror

Author: WangGuanJun
Tutor: ZhouHongJunï¼›ZhengJinJin
School: University of Science and Technology of China
Course: Mechanical and Electronic Engineering
Keywords: High harmonic suppression Filter Light source polarization Three-mirror
CLC: O432.1
Type: Master's thesis
Year: 2011
Downloads: 6
Quote: 0
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Abstract


Synchrotron radiation source for its excellent characteristics become today widely used in the extreme ultraviolet and soft X-ray light source, which is a continuous spectrum, the beam line through the monochromator Spectrophotometry Experiment Station desired monochromatic. EUV and soft X-ray is usually grating monochromator spectral, and thus inevitably contain high harmonics. The calibration accuracy of the presence of higher harmonics seriously affect the performance of light sources, detectors, and optical components, harmonics will interfere with experimental data thus error increases, and even lead to erroneous experimental conclusion. Therefore, the effective suppression of the higher harmonic components of the monochromatic light, to improve the spectral purity, to improve the performance of the optical element, measurement accuracy and detector calibration accuracy has significance. The polarization properties of light is another excellent characteristics of synchrotron radiation source, using the polarization properties of the soft X-ray synchrotron radiation has carried out extensive research in the field of biology, chemistry, physics, materials, information science and measurement science. Study polarization optical element, how to obtain a high degree of polarization of monochromatic light is particularly important. The main work of this paper is divided into the following aspects: the first choice in the 5-40nm band high line density transmission grating (3300l/mm) quantitative analysis of the distribution of high-order harmonic in the short wave suitable filter to high harmonics, and the the filter filtering is a simple and efficient high-order harmonic suppression method, to select the appropriate filter in the band to suppress the high-order harmonic and the quantitative analysis after adding a filter high Distribution of the harmonics. Respectively by integral curve quantitative analysis% of the proportion of the fundamental wave of the high harmonics. Followed for 40-115nm band currently not suitable filter filtering, metering line station this band of high-order harmonic suppression is still blank, one that is able to improve the efficiency of the polarization of the light source can inhibit the high-order harmonic method. it is very important. We have determined by a software to calculate the method in the long wavelength region can be provided through the combination of the three reflective polarizer in Au_Si_Au without additional filter in the light path which can be in the band effectively suppress higher harmonics, and the light source through a three-mirror reflection in the corresponding band light polarization characteristics of the light source can be greatly improved, 20eV when the degree of polarization can be achieved up to 99% or more, which would require a higher degree of polarization experiments provide good light. Further in the short-wave band also determine the inhibition of the filter and a three-mirror reflection mirror with high harmonics. Finally, the high-order harmonic suppression mirror mechanical design calculations. Including lens length parameter determines the angle adjustment, linear motion guides, the vacuum chamber and the vacuum seal.

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CLC: > Mathematical sciences and chemical > Physics > Optics > Ray radiation, photometry,colorimetry > Ray radiation
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