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Six -axis micro- accelerometer electrostatic levitation control system

Author: QinYuan
Tutor: ZhangWeiPing
School: Shanghai Jiaotong University
Course: Electronics and Communication Engineering
Keywords: MEMS Electrostatic levitation Accelerometer DSP Fuzzy PID
CLC: TH824.4
Type: Master's thesis
Year: 2011
Downloads: 82
Quote: 0
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Abstract


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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > Mechanical quantity measuring instruments > Speed ??measuring instruments > Accelerometer
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