Dissertation > Excellent graduate degree dissertation topics show

The Prevention of Metal Contamination in Ion Implantation

Author: CaoMing
Tutor: HuangQiZuo；LuZhuangHong
School: Shanghai Jiaotong University
Course: Software Engineering
Keywords: metal contamination ion implantation silicon layer Tungsten graphite automation
CLC: TN305.3
Type: Master's thesis
Year: 2008
Downloads: 34
Quote: 1
Read: Download Dissertation

Abstract


Thinner the gate oxide is, narrower the CD is, more important and urgent the metal contamination in ion implantation process is. Especially, when the technology goes to 90nm, the electronic parameter of wafer will be impacted much more by metal contamination. It becomes an important topic that how to control the metal contamination in ion implantation to keep high yieldThrough the study of ion implantation, it is found that there are two main sources of metal contamination. One is the equipment; the other is the manager of manufactory. The reason on equipment includes wrong usage of ionization material in ion source area and serious sputtering on the whole beam path. In the management of production, because of miss in defining rules, many split run card tests and daily monitor tests will induce very serious metal contamination cases.Most of equipment vendors add silicon layer to reduce and avoid metal contamination, which can work obviously only in short term. And it can not used as the electrode, even ion source. After improvement, we use W as a new ionization material, which is far away from doping elements in the mass electrodes, so that we can prevent sputtering and contamination in beam line.Developing and adding“E-run-card”system and“auto-monitor”system in Fab MES system can reduce the miss-operation by operators, and make it easy for production. Also, it can reduce the possibility of metal contamination in ion implantation process, improve the yield.About the measurement of metal contamination, we use both of daily TXRF and SIMS by cases, instead of SIMS only. Not only we can inspect on all tools for long term, and also we can study some single and special case, which make us improve the quality of inspection and control the cost of monitoring

Related Dissertations

  1. Design and Implementation of the military sub-district network office automation and information systems,TP311.52
  2. Dogs training management system based on WEB,TP311.52
  3. Research on the Electromagnet Lock of Earth Fault Protection for 10kV Switchgear,TM591
  4. The Molecular Identification and Preliminary Study on Mutagenic Mechanisms of Lotus Mutants Induced by Ion Implantation,S682.32
  5. Construction, Characterization and Properties of Tp~*-Containing W/S/Cu Clusters,O611.4
  6. Research of Increase the Slag Resistance Function of Magnesia Carbon Brick by Changeding Graphite,TQ175.1
  7. Design and Implementation of Education Bureau Office Automation System,TP311.52
  8. In an army official document storage , archiving , query system development and implementation,TP311.52
  9. Experimental Study on Preparation and Metal Ions Removal Capability of Expanded Graphite,TQ127.11
  10. Reliability and Security Study of the Digital Substation System,TM732
  11. Shaoxing Municipal Party office automation system design and implementation,TP311.52
  12. OA System Design and Implementation of Jiangxi Modern Polytechnic College,TP311.52
  13. Research on Single-phase to Ground Fault Isolation Method of Distribution Network,TM862
  14. IEC101 Protocol Communication System Design of 110KV Substation Automation,TM63
  15. Electronic assembly process research and implementation assistance systems,TN05
  16. Substation Voltage and Reactive Power Optimization Control Strategy and Implementation,TM761.1
  17. Huzhou city in the detailed planning of low-voltage distribution network,TM715
  18. Services based on mobile terminal industry study a number of issues,TP311.52
  19. Zhengzhou, China Unicom office automation network security protection Strategy,TP393.08
  20. Word-based automated support system Dissertation Writing,TP311.52
  21. With a small current grounding fault line selection function distribution lines monitoring device design and research,TM862

CLC: > Industrial Technology > Radio electronics, telecommunications technology > Semiconductor technology > General issues > The semiconductor device manufacturing process and equipment > Doping
© 2012 www.DissertationTopic.Net  Mobile