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Micro Dispatch Based on Ruled Lot

Author: ZhaoHongZuo
Tutor: ChengXiuLan；MaHai
School: Shanghai Jiaotong University
Course: Software Engineering
Keywords: Cu process ruled Dispatch system XML
CLC: TN305
Type: Master's thesis
Year: 2008
Downloads: 21
Quote: 0
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Abstract


With the development of semiconductor industry, Al line has been replaced by Cu line in BEOL interconnection technology. More and more fabs are occurred in china. The Cu line of SMIC was founded in 2002. Copper has some characters: 1. Diffusion, it can diffuse in Silicon or Silicon Oxidation more quickly. 2. Copper cannot form pattern by trational dry etch. 3. Copper is oxidated easily in low temperature. Based on these specialists, Cu line has different tools and process, so it has different dispatch manner.It is a problem How to improve self-capability to meet customer’s rigorous requirements, which must be solved for Fabs.In the paper, we will develop dispatch software from manufature management. The operator don’t know how to run correct lots from thousands lots, the system will give the operator a guldeline. The system uses XML and Java combination. XML setup the dispatch rule and logic, Java handles the core of the dispatch, so it is easily to setup, and more flexibility. The system will reflect the planner’s purpose, and pass it to operators absolutely.

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Semiconductor technology > General issues > The semiconductor device manufacturing process and equipment
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