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Study of a Microdevice for Micro/Nano Particles Ultrasonic Separation

Author: YangHui
Tutor: GuoHang
School: Xiamen University
Course: Precision instruments and machinery
Keywords: MEMS devices Particle separation Ultrasound Techniques
CLC: TB559
Type: Master's thesis
Year: 2009
Downloads: 115
Quote: 1
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Abstract


In the analysis or detection of biological particles , the first step is the biological particles from which the medium separation and therefore an efficient , pollution-free separation technique is crucial . Compared to other micro-nano particle separation technology , ultrasonic separation techniques with operating a continuous , ensure that the activity of the particles to facilitate the post - step treatment , and the separable non - electrical and non - magnetic particles , etc. , and therefore suitable for the separation of biological particles or manipulation. With the rapid development of MEMS technology , using micro-fabrication technology to produce MEMS devices in terms of size, weight , cost , have a very distinct advantage , which has brought a new idea for the design and manufacture of ultrasonic separation device . Ultrasonic separation device based on MEMS technology enables the device's miniaturized and chips , and provide a basis for the future on the same chip detection of biological particles . This paper proposes a novel MEMS ultrasonic separation device used in micro nanoparticles and micro- devices are analyzed and studied . In this paper the theory of ultrasonic separation of the fine particles on the basis of research , detailed analysis of the force condition of particles in the MEMS ultrasonic separation device , gives the fine particles by the force of the one-dimensional analytical model , in this study based on the fine particles in a fluid medium in movement and gather and discuss the force of the impact of particles of various factors , exercise . On the basis of analysis of the characteristics of each part of the structural vibration of the MEMS device , the completion of the design of the device to determine the device fabrication process , to achieve a MEMS ultrasonic separation device manufacturing . Text analysis method and finite element analysis method combined with analytical device operating mode sound field distribution analysis . Study wherein the sound field in the device is divided into two parts , i.e. a device the micro film vibration excitation of the sound field with a fluid medium caused by the sound attenuation in the two parts of the analysis based on the results obtained a miniature ultrasound device determine particle separation effective sound pressure is discussed based on the separation of the different types of biological particles , Finally, the paper summarizes the work of the whole issue , and the need for further research and development in the future .

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CLC: > Industrial Technology > General industrial technology > Acoustic engineering > Ultrasonic Engineering > The application of ultrasound
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