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The Research of Confocal Probe Based on Time Difference Measurement

Author: LvDongFu
Tutor: ZuoZuRong
School: Tianjin University
Course: Measuring Technology and Instrument
Keywords: Non-contact measurement Confocal probe Dynamic initiative focusing Time difference FPGA
CLC: TH74
Type: Master's thesis
Year: 2007
Downloads: 33
Quote: 0
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Abstract


Very rapidly in recent years, the development of non-contact probe , become an important development direction of the measurement technique . Non-contact probe, the measurement does not contact the measured object can be quickly measured object scan measurement , and during the measurement there is no friction and the measuring force , very suitable for easy breakage, the measurement of minute objects . This paper proposes a novel optical non-contact probe - based on the time difference method confocal laser probe , it uses a dynamic initiative focusing method to accurately measure the position of the object and the surface , so to improve the traditional confocal probe measuring range small defects , and the time difference method used in the measurement principle calculated the measured object relative to the displacement of the equilibrium point , thus simplifying the system structure , reducing the cost of the probe to ensure measurement accuracy premise , to make it more effective services in a modern production fields. The main content of this paper is as follows : 1 , a brief introduction of the principle of dynamic initiative focusing probe . 2 , a simple description of the system structure and component selection . Optimization of the mechanical structure of the probe , to improve probe adjustment device , it increased in the XY direction adjustment based on the Z to adjust the focus of a small aperture in the system equilibrium position at generate accurate photoelectric signal. 3 , focuses on the circuit structure ( including the realization of analog circuits and digital circuits ) design and the time difference method in software . Improve the conventional analog circuit , the introduction of hysteresis comparator circuit , to ensure the quality of the photoelectric signal and forks signal generating square wave signal . Designed the FPGA digital circuit system controlled by the CPU , and the analysis of a square wave signal from the FPGA , to obtain the time difference . 4 , introduction experiments and analysis of experimental data . 5 , pointed out that the place the focal laser probe future development and should be improved based on the time difference method common .

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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > Optical instruments
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