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Study on 2D Wide-range, High-precision Displacement Measuring Method and System Based on Planar Capacitive Sensor with Direct Decoupling Effect

Author: ZhangZuoHui
Tutor: WangWen；ChenZiChen
School: Zhejiang University
Course: Mechanical Manufacturing and Automation
Keywords: Planar capacitance sensor Two-dimensional displacement measurement Large range Direct decoupled measurement methods Ultra-precision displacement measurement
CLC: TP274
Type: Master's thesis
Year: 2008
Downloads: 235
Quote: 6
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Abstract


With the rapid development of science and technology, sophisticated detection technology has been more widely used. Displacement detection technology in particular, with the development of modern industry, and gradually towards the high-precision, a large number of processes and multi-dimensional displacement direct measurement of the direction of development, and to ask the detection system can achieve real-time, on-line measurement. One-dimensional linear displacement measurement has been able to achieve the millimeter range, nanometer resolution, but there are still small-scale, multi-dimensional displacement measurement system, the system cost of many shortcomings. With the direct detection of the two-dimensional displacement demand continues to increase, the study of low-cost, good performance of high-precision direct decoupling of large Cheng Erwei displacement measurement system has a very important significance. This article is based on a self-developed planar capacitance sensor related research. Papers based on the basic principle of capacitive sensors measure displacement, the design of the structure of the realization of two-dimensional displacement directly decoupling measurement plane capacitance sensor, a large range based on the planar capacitance sensor, direct decoupling of the high-precision two-dimensional displacement measuring method, and the development of a two-dimensional displacement the direct decoupled measurement system prototype. The main research contents are as follows: The first chapter reviews the research status of the ultra-precision displacement detection technology and its development trend, the new requirements of the development of modern science and technology for ultra-precision displacement detection technology, analysis of the existing problems On this basis, the research projects purpose, meaning and paper content. The second chapter describes the basic principles of the capacitive sensor detects displacement, based on a large number of planar capacitance sensor, high-precision direct decoupling of the two-dimensional displacement measurement methods, designed on the basis of two-dimensional displacement decoupled direct measurement The planar capacitive sensor structure, and the function expansion. Chapter plane capacitance of the capacitive sensor and the corresponding sensitivity calculation method, and the structure of the planar capacitance sensor has been optimized. The fourth chapter describes the hardware developed based on the planar capacitance sensor directly decoupling of the two-dimensional displacement measurement system. Focus on the analysis of the detection of planar capacitance sensor signal conditioning hardware circuit. Capacitance signal detection techniques combined with the characteristics of the planar capacitance sensor, signal conditioning unit circuit is designed, proposed and implemented an effective anti-jamming measures. Chapter V direct decoupling of the two-dimensional displacement measurement system signal processing algorithms and software development, research required to obtain the amount of displacement of each software function modules and the overall program design and testing program based on LabVIEW and data acquisition card also proposed to facilitate control system integrated DSP-based real-time processing programs. Chapter VI through experiments to test the stability of the the hardware circuit input and output signal, and the measurement system key performance indicators were determined, the experimental results were analyzed according to the experimental data. Chapter VII summarizes the contents of the full text, and further research were discussed.

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