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Mechanical Characterization for Low-k Film of ULSI Interconnects by LSAWs

Author: BaiMaoSen
Tutor: XiaoXia
School: Tianjin University
Course: Microelectronics and Solid State Electronics
Keywords: low-k LSAWs Young's modulus Filtering Spectrum analysis The method of least squares Dichotomy
CLC: TN405.97
Type: Master's thesis
Year: 2007
Downloads: 47
Quote: 2
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Abstract


Interconnect system has become the bottleneck of the development of high-speed, high-performance, high-density integrated circuits. Low dielectric constant (low-k) is integrated into the main research direction to solve this bottleneck problem ULSI interconnect systems. Precisely defined the characteristics of low-k dielectric film hardness is the key to solve the mechanical challenges faced by low-k dielectric interconnect. Laser-generated surface acoustic waves (Laser Generated Surface Acoustic Waves, LSAWs) detection technology the outstanding advantages due to its fast, accurate, no damage, in particular suitable for online detection of fragile, ultra-thin, low hardness medium film Young's modulus. The SAW propagation dispersion theory and LSAWs-experimental data processing method of the subject to further promote detection technology research LSAWs. For ULSI interconnect systems in the theoretical aspects of the study from the propagation medium wave equation, the calculation model established theory of isotropic thin film / silicon substrate, and the study on the basis of a large number of results the influence of the dispersion curve of the film thickness, density, Young's modulus, etc. of various parameters on the theoretical calculation. Nanoporous Silica is the most potential to be applied to the medium of the low-k interconnect systems. Showed a periodic distribution of films to solve the original calculation model can not meet the nanopores, the study further established computational model of \nanoporous silica film of the parameters for the propagation characteristics of the SAW made an in-depth analysis and research. Experimental data processing, the appropriate sampling system constructed according to the Nyquist theorem. The present study was designed using the design method of the windowing function having a linear phase characteristic of the FIR software filter to attenuate the noise in the lab environment pollution has reached the processing of experimental data analysis requirements. In the design of software filters, we carefully study the characteristics of various window function, Kaiser window parameters on the performance of the Kaiser window, and ultimately choose a flexible parameter adjustment Kaiser window as the design load window function. A time selected by the base (DIT) -2 FFT algorithm used for experimental signal spectrum analysis in this study. In this study, based on careful study of the spectrum characteristic of a variety of commonly used window function window, load the appropriate window function to reduce spectral leakage; way to add zero value at the end of the signal and reduce the spectrum fence effect. On the basis of the obtained signal spectrum, by a certain formula, calculated from the dispersion curve of the experimental signals. In this study, the experimental dispersion curve and the theoretical calculation of the dispersion curve fitting using the least squares method of discrete data points fitting into a smooth dispersion curve. Find experimental dispersion curve most closely matches the theoretical dispersion curve is one of the key to improve the accuracy of measurement results. This study, using a first derivative method can improve the resolution of the close proximity of curves. And automatic optimization procedure based on the dichotomy Find design to achieve automatic optimization of online detection, rapid, accurate given the Young's modulus of the samples within the accuracy of the test.

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Microelectronics, integrated circuit (IC) > General issues > Manufacturing process > Interconnection and multi - layer wiring technology
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