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Research on High-Accuracy Multi-channel Temperature Measurement Technology

Author: XueQingHua
Tutor: LiXiaoPing
School: Huazhong University of Science and Technology
Course: Industrial Engineering
Keywords: Temperature measurement Constant current source FPGA Projection lithography machine
CLC: TP274
Type: Master's thesis
Year: 2007
Downloads: 520
Quote: 6
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Abstract


Precision temperature control has a wide range of applications , temperature control performance directly affect the performance of the equipment in the field of integrated circuit devices , fine chemicals , bio-medicine , precision optics , precision instrument measurement , measurement results , the effect of biochemical reactions , while the temperature control based on temperature measurement , monitoring and control due to the need to control the temperature of the object field , multi - point temperature measurement is necessary , therefore , to study the high - precision multi-channel temperature measurement technology has a good prospect of application . This study mainly oriented IC key equipment - high - resolution projection lithography machine , in order to solve the technical problems of the high-precision multi-point measurements of temperature , humidity , pressure , flow , and feedback to the measurement results of the main control system via the VME bus . It is the special needs , usually data acquisition system mainly uses the PCI bus or other means of communication , a single measurement board of several measuring points of the fluid parameters measured , but need more than one such measurement board to meet equipment fluid parameters measured at the same time the demand of more than ten measurement points , unable to meet the requirements of the device control structure and size of the space constraints . In this paper, the simulation and experimental analysis of the influencing factors of the high-precision constant current source , circuit standard resistance values ??established by the relationship between the temperature fluctuations and fluctuations in output current single operational amplifier circuit to achieve the precision constant current source , reducing the constant the stream source the requirements of the performance of the standard resistor , can be in the larger range of temperature conditions to meet the performance requirements of the measurement . Studied the factors that affect the measurement accuracy , such as conditioning circuits , channel switching circuit due to the presence of leakage voltage and nonlinear temperature drift of system error . In this paper, the FPGA control bus communication , ADC conversion, hardware design , channel selection control structure is simple , low cost , good reliability . Temperature measurement board developed 16-channel VME bus with Super Thermometer 1590 experimental comparative analysis showed that the measurement accuracy of 0.003% , has been successfully applied to the major national special 100nm resolution projection lithography machine were lithography the machine internal air temperature , humidity , pressure and flow rate of 16 measurement points for data acquisition , reliable operation .

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CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Automation systems > Data processing, data processing system
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