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The Research on Interference Phase Unwrapping Algorithms for Precise Measurement of MEMS Device

Author: RenHaiXia
Tutor: ChenHaiQing
School: Huazhong University of Science and Technology
Course: Physical Electronics
Keywords: Phase unwrapping Least Squares Discrete cosine transform (DCT) Multigrid
CLC: TP274
Type: Master's thesis
Year: 2007
Downloads: 69
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Abstract


Phase unwrapping algorithm was originally applied INSAR data analysis, and later applied to terrain mapping . From the mid -1990s , phase unwrapping algorithm with MEMS technology evolved to become the most advanced MEMS dynamic testing techniques stroboscopic microscopic interferometer system (SMIS) measuring a key part of MEMS surface morphology . Phase unwrapping algorithm is directly related to the merits of MEMS characteristic parameter detection instrument parameter settings and test accuracy . The main research topics for recovery deformable mirror surface topography of three-dimensional phase unwrapping algorithms. First introduced phase unwrapping algorithm development in the world , research background , the paper source and main contents , and then introduces the principle of the interferometric phase unwrapping based on the path tracking method and the minimum norm method these two basic algorithm for analysis. Focusing mainly on studies topics squares phase unwrapping algorithms. First introduced the basic principle of least squares method , respectively, and the discrete cosine transform ideas to elaborate multi-grid method and demonstrated their algorithm implementation steps ; then discrete cosine transform and multigrid algorithms are applied to the minimum two multiplication to recover the three-dimensional topography simulation graphics ; obtained by simulation to compare the phase diagram and data after the introduction of these two algorithms convergence speed of the size and standard deviation values ??, and then introduces the principle and the weighted least squares method the multi-grid algorithm is applied to one of the algorithm implementation steps , draw the algorithm of noise situations superiority. The issue came to the conclusion of the measured data showed that: weighted least squares method applied to phase unwrapping , can better be MEMS-DMs surface topography , the characteristics of MEMS for subsequent tests provide a guarantee.

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