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The acceleration sensor is a very important mechanical quantity sensor is one of the basic components of the inertial measurement unit ( IMU ) system . With the development of modern science and technology , automotive, industrial automation, aerospace, missiles and other areas of the acceleration sensor miniaturization , high-performance requirements . The development of modern science and technology ( MEMS technology ) provide the technical foundation for the acceleration sensor miniaturization . Explore on new principles, new structures, new functions , high - performance micro - acceleration sensor has become the world 's research focus . The author of this article Throughout the silicon micro- acceleration sensor and vacuum microelectronics research status , vacuum microelectronics technology , MEMS technology and sensor technology is proposed , based on the principle of the cold cathode field emission study a new type of integrated vacuum micro electronic acceleration sensor . The sensor set the advantages of solid state devices and vacuum electronic devices in one: anti-radiation, temperature stability , fast response , high sensitivity , high-resolution , low-voltage, low-power signal processing circuit is simple , small size , etc. . The paper around the vacuum microelectronics acceleration sensor of the underlying theory and key manufacturing technology in a more systematic and in - depth research , focusing on integrated vacuum microelectronics acceleration sensor structure , working principle, mechanical, electrical characteristics . Computer simulation using finite element analysis software ANSYS micro - structure , static analysis , modal analysis and harmonic response analysis, the micro-accelerometer structure size of its displacement , the resonant frequency and mode shapes investigated . On this basis, the structure optimization of the design and process design , the tip of the cone forming process and mask - mask etching process , according to the process to map out the territory of the lithography mask for sensor development has laid a certain foundation.
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