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Beam shaping element of phase coding and Fabrication of

Author: XuBing
Tutor: ChenLinSen
School: Suzhou University
Course: Optical Engineering
Keywords: Beam shaping Diffractive optical element Binary optics Projection objective Laser Direct Writing
CLC: TN24
Type: Master's thesis
Year: 2004
Downloads: 390
Quote: 3
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Abstract


In many areas of application of laser technology, the laser beam has a high quality requirements. In the beam shaping technology devices, binary optical elements due to their small size, flexible design, the diffraction efficiency advantages, has become a hot research topic in the field, where the diffraction pattern for a particular binary phase coding and optical elements relief structure of the production phase, a binary optical element for beam shaping technology more prominent of the two difficult problems. In this thesis, the diffraction pattern of a particular phase coding and its production process for the study seeks to find a faster convergence rate and can converge to the global optimal solution phase optimization algorithm; while the development of a production process is simple, low-cost two Yuan optical components production methods. Thesis adopts the relevant diffraction theory, computer simulation analysis as a means to the ultimate outcome of experimental verification comprehensive research methods. Paper discusses the use of iterative algorithms for arbitrary lattice Fourier diffraction pattern for the basic principles of phase encoding, and for the algorithm easily fall into local optimal solution prematurely defects studied the effects of several factors reconstructed image quality obtained a high degree of convergence and convergence rate corrected Fourier iterative algorithm. Fine reduction projection lens is parallel laser direct writing system is one of the core components, and its image quality directly determines the production of the device's optical performance. In this paper, ZEMAX optical design software for parallel laser direct writing system designed 10x double-telecentric fine reduction projection lens, and its optical properties were analyzed; but also for the party spot laser direct writing system designed to reduce the magnification of 20 using a projection microscope objective imaging system, in order to obtain high-quality beam shaping device provides good hardware. Using laser direct writing system are discussed using the Gaussian spot lithography, photolithography and square spot area by making two other methods lithography step binary optical elements of the basic principles and the production process, the experimental results and the use of MATLAB software brings several lithographic method carried out a detailed analysis of experimental error. The proposed low-cost, high-performance binary optical element in the design, production of the beam shaping element very effective way, while experiments show that the point having a square laser direct writing lithography system is a major production diffractive optical element The tool will provide simple process, short cycle, low-cost production of binary optical elements provide a new choice.

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Photonics technology,laser technology > Laser technology, the maser
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