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Low sputtering rate MCP anti ion feedback film experimental study
Author: ZhuYuFeng
Tutor: PiDeFu;XiangShiMing
School: Nanjing University of Technology and Engineering
Course: Electronics and Communication Engineering
Keywords: Microchannel plate (MCP) Anti- ion feedback film The shimmer on behalf III tube
CLC: O484
Type: Master's thesis
Year: 2004
Downloads: 52
Quote: 0
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Abstract
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Microchannel plate (MCP) Anti - ion feedback film in essence is an ultra-thin amorphous Al 2 sub > O 3 sub > continuous membrane study MCP Anti ion feedback film and its impact on ⅲ generation shimmer tube impact object is to improve substituting III shimmer performance of the tube . Diode quenched cold magnetron sputtering technique is prepared MCP anti ions feedback film a more advanced technical solutions, which improves the quality of the film of the anti - ion feedback MCP mask prepared by the process will not be flooded , lower with the ultraviolet radiation Tuomo the contamination of the surface of the carbon film MCP channel . The test of this experiment and theoretical analysis of the performance of the ion feedback preventing film and a filmed MCP , low sputtering rate MCP anti ion feedback the optimum conditions of the film formation , and that anti - ion feedback film can effectively prevent feedback through electronic ion ; MCP electronic gain in the band after the film decline, the volume resistivity increases , the dark current is reduced , the detection efficiency decreased . Diode to arrest the cold RF Magnetron Sputtering anti ion feedback film process conditions are harsh , the deviation from the best film-forming conditions can not form a continuous film on the MCP , and caused serious MCP channel surface carbon pollution . The carbon pollution MCP Anti- ion Feedback the film new process method is an effective way to raise a generation of III shimmer tube performance . The new process by the self-sustaining the continuous organic substrate preparation, aluminum ion deposition and anti- feedback membrane attached three processes . The new process avoids the direct contact of the MCP with water and the organic film , the inner surface of the channel of the MCP from carbon contamination . The test results show that the new process does not affect the volume resistivity of the MCP , the dark current and the working life , less impact on the electronic gain of the MCP , New Process Preparation of anti - ion feedback low carbon content of the film layer .
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CLC: > Mathematical sciences and chemical > Physics > Solid State Physics > Thin Film Physics
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