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Research on System-Level Modeling and Simulation of Microelectromechanical Systems

Author: WangChenHua
Tutor: GuoWanLin
School: Nanjing University of Aeronautics and Astronautics
Course: Engineering Mechanics
Keywords: Microelectromechanical systems System Modeling Design Verification NODAS model library Hardware description language Casimir Effect
CLC: TH703
Type: Master's thesis
Year: 2005
Downloads: 491
Quote: 1
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Abstract


Micro-electromechanical systems (MEMS) is the intersection of the rapid development of multi- disciplinary technical , but there is the problem of the MEMS product development cycle is long, and the high cost , the design level is far lagging behind the manufacturing level , not scale MEMS products . MEMS design methods and design tools have become the focus of the study of international MEMS , microelectromechanical systems modeling and simulation technology is the key MEMS computer virtual design . In this paper, a lumped parameter modeling idea , established NODAS unit model library for the simulation and design of MEMS system . NODAS model library includes series model unit ( two-dimensional , three-dimensional linear beam , geometrically nonlinear beam , the anchor , the mass , electrostatic gap electrostatic comb composite thermal beams , electric beams , etc.) , its behavior model by MAST hardware Description Description language . In this paper, the physical modeling and simulation of all cells in the library , verify the accuracy of the model by ANSYS finite element simulation , the errors were within 5% . Schematic visualization in EDA circuit emulator SABER environment to build MEMS systems , MEMS system -level modeling and simulation , and propose the MEMS system structural parameters of the design process and verification methods based on MAST cell library . This article NODAS MAST library modeling and system simulation can support multi - physical field structure , electrostatic , thermal analysis , can be compatible with the circuit , and meet the complex system simulation accuracy requirements , provide efficient verification method for the rapid design of MEMS system , easy the optimization of the design structure . Of another work for micromachined membrane stability under the electrostatic force and Casimir force Casimir effect of the film lateral offset impact . Calculated by the numerical method of determining the film stability parameter K and K curve critical value Kc , and to provide a design of high length to thickness ratio (L / h) of the static method of the thin film structure .

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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > General issues > Structure
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