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Laser synthetic wavelength interferometer nanometer measurement system and its signal processing method

Author: WeiFeng
Tutor: DingQiQuan；ChenBenYong
School: Zhejiang University
Course: Mechanical Manufacturing and Automation
Keywords: Nano Metrology Synthetic wavelength Stripes subdivision CPLD VHDL
CLC: TH744.3
Type: Master's thesis
Year: 2005
Downloads: 353
Quote: 3
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Abstract


Interference signal processing methods to the core of the system as a laser interferometer , has been much attention . In the laser interferometer , measurement accuracy depends largely on the signal processing method. Achieve nanometer measurement accuracy of laser interferometer , without exception, the need to subdivide the fringes signal the subdivision precision interferometer measurement accuracy . Therefore, the present study of laser interferometer is mainly focused on the study of the interference signal segmentation . National Natural Science Foundation of \Improvements have been made on the specific working principle of the interferometer and the mechanical structure the component a signal processing system has been studied based on this , the core of the laser interferometer of the synthetic wavelength . More comprehensive analysis of the error count problem may appear in the signal processing of large numbers : an 8 -fold subdivision of large numbers of interference fringe counting method ; careful analysis of the counts , a phase difference between the two interfering signal extraction may occur several error conditions, the proposed combination of signal processing method of a size number accuracy . Complex programmable logic device (CPLD) to complete the design of signal processing systems .

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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > Optical instruments > Physical optical instruments > Interferometer
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