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Study & Design of Power Supply Applied in Plasma Deposition

Author: LiZhiBing
Tutor: FanYinHai
School: Dalian Maritime University
Course: Power Electronics and Power Drives
Keywords: Plasma High - frequency switching power supply PWM
CLC: TN86
Type: Master's thesis
Year: 2005
Downloads: 210
Quote: 0
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Abstract


With the rapid development of electronic technology , more and more extensive applications of electronic systems , more and more types of electronic equipment , electronic equipment and people working and living increasingly close relations . Any electronic devices without reliable power , increasing their power requirements . Modern society, hardness has certain requirements for certain products , in order to achieve this aim , in the industrial production process , often required for certain products surface coating, in order to enhance its abrasion resistance and scratch resistance ; example daily life of the watch and mobile phone casing , drill bits, such as used in the industrial areas of the blade , and so on . In physical chemistry , which is a surface-modified , need to make a strong electric field plasma ionization of certain gases in a certain pressure and vacuum in the vacuum oven , thereby subjected to a plasma coating process in a vacuum oven pendant ; which a high frequency pulse power supply voltage field of a certain frequency is applied to the two electrodes of the vacuum furnace is required . In this thesis, the research design power frequency pulse power supply is to meet this need . Power design with a three-phase power frequency AC power input , after a three - phase thyristor rectifier filter , boost full-bridge inverter and high-frequency transformer ; PWM (pulse width modulation ) control circuit and PID ( proportion of differential and integral ) control , resulting in a high frequency square wave pulse equipment . After theoretical studies , schematic design , and the whole experiment , prototype basically reached the original design goals , but some aspects need to be further refined and improved .

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Radio equipment,telecommunications equipment > Power supply
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