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Study on Properties of Functional Materials Prepared by High Pressure DBD Plasmas

Author: FuYaBo
Tutor: ChenQiang；GeYuanJing
School: Beijing Institute of Printing
Course: Materials Physics and Chemistry
Keywords: DBD Plasma tail region Synthesis DLC film Carboxyl functional membrane Carbon Nanotubes
CLC: TB34
Type: Master's thesis
Year: 2006
Downloads: 123
Quote: 0
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Abstract


Dielectric barrier discharge (DBD) is a higher pressure in the non-equilibrium plasma generated within the discharge mode. DBD Functional Materials is a novel material preparation method, with discharge device is simple, easy to operate, processing speed, good effect, environmental pollution, energy saving can be realized in a large variety of substrates at low temperatures area of ??synthetic functional materials, is a very promising market technology. In conclusion, a variety of thin film preparation method, based on the dielectric barrier discharge device used in this article, in the plasma tail area functional film synthesis, avoiding easy to produce filamentary DBD discharge and streamer discharge bombardment of the substrate produces shortcomings , while use of the DBD discharge amount sufficient to produce the advantages of active species in the plasma tail region can be fast and efficient film deposition. This study only break through the traditional low pressure plasma process limitations of synthetic material, the experiment in 200Pa ~ 50kPa pressure range type were synthesized diamond, the-COOH group-containing film and the carbon nanotube material three functions validates the DBD End deposition equipment practicality. Through materials synthesis experiments and performance testing analysis, preparation of thin films replant device synthesis was studied, and the mechanism underlying the synthesis of doing a preliminary study. The main research work and achievements are as follows: I. Synthesis of diamond-like carbon film part (1) DBD plasma at the end of the first area in the 200 ~ 500Pa pressure conditions, the CH4, Ar and H2 as the reaction gas mixture of synthetic DLC films by FTIR and Raman tests found, prepared DLC film has a strong feature. It was found that synthesis of DLC films better parameters: temperature of 200 ℃, H2 and CH4 ratio between 1:1 and 1:2, the working pressure of 500Pa; (2) the temperature on the synthesis of DLC films is not great and synthesis gas CH4 content on DLC film significantly influence the performance, DLC films phase content and water contact angle values ??with the increase of content of CH4, but also larger roughness; (3 ) at the end of dielectric barrier discharge area, DLC films synthesized more easily enriched carbon (CH4 high proportion of high pressure and pure CH4) gas is generated, can fully reflect the rapid deposition of high pressure DBD discharge characteristics, but at the same defects in the film also increased, resulting in the film density and uniformity are reduced. II. Synthetic carboxyl functional thin section (1) This is the first in a dielectric barrier discharge plasma tail region, the reaction of acrylic monomer, the success of the PAA functional polymeric film, the test found the water contact angle of the film can be reduced to the minimum 3o, with super-hydrophilic surface properties, while the test results show that IR hydroxyl, carboxyl and carbonyl groups and other polar groups of the polymerized film in the PAA;

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