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Research on the Piezoelectrics-Stress-Fluid Coupling Numerical Simulation of the Valveless Micropump

Author: YangJiLing
Tutor: DuLiQun；XuZheng
School: Dalian University of Technology
Course: Mechanical Design and Theory
Keywords: Valveless piezoelectric micro- pump Numerical calculation Multi-physics coupling Piezoelectric ceramics Microfluidic Chips
CLC: TH38
Type: Master's thesis
Year: 2006
Downloads: 314
Quote: 3
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Abstract

No valve piezoelectric micro pump is the use of the mechanical vibrations of the piezoelectric oscillator after voltage is applied to achieve a novel fluid transfer fluid transport member can preferably be obtained at a lower voltage output capability, simple structure, ease of processing, and micro , is a small flow rate is required, precise control, and the continuous output of the micro total analysis system, the most important one of the fluid-driven device. In this paper, a multi-physics coupling software CFD-ACE on the valveless piezoelectric micro-pump, three-dimensional dynamic numerical computing research. Through the valve piezoelectric micro-pump structure optimization, numerical computation, and integrated micro-pump to the cross-channel microfluidic electrophoresis chip on system simulation, in-depth study of the piezoelectric - stress - fluid coupling field miniaturized after the micro-pump The output characteristics and can be applied. Excitation of the sinusoidal voltage, the deformation effect of the piezoelectric oscillator in the internal fluid of the micro-pump, while the fluid on the piezoelectric oscillator also has a reaction, the working process of the simulation can be more accurately predict the output characteristics and integrated micro pump Decline Micropump fluidic chip features. Structural grid valve piezoelectric micro-pump model for the discretized system simulation needed CFD-ACE flow field, electric field, stress field, and mesh deformation four modules. The accuracy of the numerical calculation process, and constantly adjust the transient calculation time, the fluid velocity space difference scheme as well as the number of iterations and time steps to ensure that the average residuals of all physical quantities are less than 1E-05. Meanwhile, the application Fortan90 language CFD-ACE secondary development, free valve piezoelectric micro-pump transient flow output. The numerical analysis of the expansion of the Reynolds number of the pipe elements coincide, their results and the experimental results of the German Torsten Gerlach et al. Create a mathematical model of the flow field inside the micro-pump, its expansion angle, expansion ratio, the depth of the pump chamber to optimize the design, optimized structure suitable for processing expansion angle of 9 °, and expansion of the minimum cross-sectional area ratio of 15, the expansion tube 80 × The etching depth of 80μm, the pump chamber is 80μm. Piezoelectric (1000 × 1000 × 200μm) and silicon substrate (12000 × 12000 × 50μm) square piezoelectric vibrator modal analysis, the resonance frequency of the first order 7.114kHz. Complex valve piezoelectric micro-pump flow rate increases with increasing excitation voltage amplitude, as the frequency increases trend. The maximum displacement of the piezoelectric transducer and valveless piezoelectric micro-pump flow rate as the frequency variation is not identical to that: the volume enclosed by the do not consider the fluid action of deformation of the piezoelectric oscillator is equivalent to the output of the micro-pump flow Conclusion the inaccuracy; low frequency piezoelectric transducer when the maximum displacement with the frequency change does not necessarily have a peak is the resonance frequency of the micro-pump. In the the valveless piezoelectric micro-pump integrated cross-channel microfluidic electrophoresis chip system simulation, micro pump can work properly, steady state flow of fluid injection channel microfluidic chip verified valveless piezoelectric micro-pump miniaturization can be applied, as well as for the miniaturization of micro total analysis system integrated to provide a reference.

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