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In this paper, a new-style detector, CdZnTe compound semiconductor detector, is introduced, the energy spectra of x-ray fluorescence of some specimens excited by 241Am are acquisited and analyzed in detail. Based on these jobs, a energy spectrum analysis program is developed. Then this system is used in XRF. An improved L-T-P equation is adopted for correcting matrix effect. The max relative deviation is less than 7%, and the mean deviation is less than 3%. The results are satisfying and can settle for general industry and research application.In the experiment, some characteristics of energy spectra are discovered, such as asymmetry of the peaks with energy of over 40KeV, the distinct tailing effect of low energy part of the peaks, more severe tailing with higher energy, the distinct Cd and Te escape peaks for 241Am which is advantageous of energy scale and so on.In the quantitative analysis, combined with experiments, three correction methods for matrix effect are compared. The results’ deviation of L-T-P equation is very large. Then the L-T-P equation is modified. Using the improved L-T-P equation, the more exact results are derived and better than other two methods. In the experiments, the error is further reduced by improving ROI settings.Finally, the error is detailedly analysed and methods for minishing deviations are discussed in this paper.
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