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As the proposed high-resolution seismic exploration, high-fidelity, etc. over the years many domestic and foreign technology companies and research institutions have been exploring and finding new seismic signal detection devices, and conducted many tests, such as the introduction of some use pressure ceramics, eddy current, laser and other principles of test products, but the key technology in the performance never a major breakthrough.Acceleration Sensor Based on MEMS geophones in the band, dynamic range and axial interference and other performance indicators is better than the traditional moving coil detector. For high-resolution, high fidelity, high-precision, seismic exploration of this application, it needs to further improve the performance of MEMS acceleration sensor. Therefore, this paper selects the MEMS capacitive acceleration sensor.This paper is as follows:First, the preface introduces the MEMS sensor research status and development prospects, and brings forward the research content and the meaning of this issue.Second, a brief description of the classification of seismic detectors, mainly introduces regular, super, digital geophone characteristics of the structure and properties of the selection principle of the earthquake detector;Then, System design, its contents are mainly:the working principle of MEMS accelerometer and the structural model, deriving accelerometer the ratio between input and output relationship, the types and selection of SCM principles, the main selected devices of this paper and their technical parameters and characteristics. After the detailed design of the system circuit,diagrams three-way AD sampling and communication between the microcontroller, using EPM7032S of CPLD chip expands I/O ports, through EPM7032S its programming to meet the 8-crossover effect on AD to film three-way election. In addition, the use of microcontroller and MAX485 converter chip serial communication PC-level translation. It designs a three-way AD, EPM7032S and three schematic microcontroller, microprocessor and an external RAM in the schematic diagram, block diagram is given for timer interrupt, AD interrupt block diagram, and the serial port receiver block diagram. And the dynamic range of detector is analyzed in detail.Finally, summary and outlook for the full text. Proposes the next step
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