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Micro-electromechanical systems (MEMS) for the 21st century high-tech , electronics, machinery, materials , manufacturing, and automatic control , physical , chemical and biological and other disciplines related to MEMS in the 21st century will be the most important , the most active areas of research . Micro- accelerometer is a very important direction of the micro-electromechanical systems , it is widely applied to the field of inertial navigation and guidance, bio - medical , agriculture, automotive industry , prospecting Seismic , robotics, industrial automation, toys, etc. . In this paper, a MEMS technology based on capacitive force balance silicon micro- acceleration sensor , the sensor using SOI and silicon - glass key techniques produced , forming a sandwich structure of glass - silicon - glass . The sensor is able to meet the measurement of the change in acceleration in a wide range . In this paper carried out the following main research work : an analysis of several typical acceleration sensor principle , and compare their advantages and disadvantages , combined with the existing experimental conditions and issues a wide range of features , the proposed a capacitive force balance silicon micro-accelerometer . Analysis , research, design and structure of the sensor , wide amount Cheng Pingheng micro-accelerometer sensor works to establish a mathematical model to determine the make the system stable conditions to be met , the analysis of the system security conditions must be met , according to the proposed structure , in theory, the parameters of the cantilever simulation analysis to select the appropriate parameters , and simulation with Matlab and Ansys , verify that the selected parameter reasonable to determine the structure of the micro-accelerometer , and verify that the micro-accelerometer with a wide operating range. 3 Study on the crystallographic orientation of the silicon single crystal , the production of micro-accelerometer oxidation, photolithography, diffusion bonding , corrosion, and plasma etching such as MEMS process were studied in detail . Proposed micro-accelerometer technology , design, draw a flow chart, templates , and making the problem analysis and proposed solution .
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