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The simulated annealing Simplex Joint algorithm ellipsometric data processing

Author: WangLiJuan
Tutor: HuangZuoHua
School: South China Normal University
Course: Optics
Keywords: The simulated annealing Simplex joint algorithm Ellipsometry data processing Absorbing film Bilayers Single wavelength ellipsometers
CLC: O439
Type: Master's thesis
Year: 2007
Downloads: 102
Quote: 2
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Abstract


Ellipsometry technique is a measurement and advanced methods of research material surface film optical properties , has the advantages of high accuracy, rapid and non-contact with a wide range of applications in the fields of physics, chemistry, materials and biomedical . Ellipsometry data processing ellipsometric measurement technique important part . Ellipsometry beyond the complexity of the equations , the inversion of the actual film types have been studied topics and hot . This paper reviews the development and current status of the of ellipsometry data processing at home and abroad ; analysis of common iterative method ellipsometric data processing and improved ; absorb the advantages of simulated annealing and the simplex algorithm , proposed a joint algorithm for single- wavelength the ellipsometry data processing ; HST use of independent research and focus on research and analysis of joint algorithm parameter selection , the sources of error and joint algorithm ideal single-layer transparent film , single-layer absorbing film , the inversion of the double-layer transparent film ; -3 vertical single wavelength ellipsometers monolayer transparent film and absorber film of the actual measuring , while the data is processed . The experiments show that : simulated annealing simplex joint algorithm is feasible and reliable . Further improve the joint algorithm will greatly enhance and extend the functionality of the single-wavelength ellipsometer and make it more widely used in practice .

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CLC: > Mathematical sciences and chemical > Physics > Optics > Applied Optics
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