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Analysis of High Frequency Plasma Reactor for Preparing Nano-Particles

Author: ZhuangZhuang
Tutor: SunYanPing
School: Taiyuan University of Technology
Course: Chemical Engineering
Keywords: High-frequency plasma Chemical vapor deposition Nanocrystals Reactor Analysis γ-Al2O3
CLC: TB383.1
Type: Master's thesis
Year: 2007
Downloads: 86
Quote: 1
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Abstract


The high-frequency plasma technology has been widely used in the preparation of nano-materials , but fewer research papers on the high - frequency plasma reactor analysis . Based on the basic theory of chemical reaction engineering , high-frequency plasma vapor deposition process of the prepared nano- powder materials , the universalization of the two-dimensional steady-state the cyclic frequency plasma reactor model , considered Greatz problem . Crank-Nicholson finite difference method for solving such model , and the preparation of a program for solving the universalization of the type of two-dimensional partial differential equations . Based on this method , the paper gives the temperature in the high - frequency plasma reactor , a numerical solution of the conversion rate and saturation distribution ; detailed discussion of the mass transfer the Peclet heat transfer Peclet, the number of radiation Boltzmann Boltzmann None dimensional quasi - high-frequency plasma reactor temperature , conversion rate , and over- saturation ; further explore the plasma torch radiation heat transfer , axial convection and radial backmixing of temperature , conversion rate , and condensed matter physics parameters over saturation ; frequency plasma reactor heat transfer, mass transfer for the quantitative analysis of nanomaterials into the nucleation and growth process , to provide a theoretical basis for the understanding and design of high-frequency plasma reactor . HF-PCVD method reaction process is fast , continuous , easy to implement high - purity γ -Al 2 O 3 nano powder batch preparation . Using high - frequency plasma chemical vapor deposition (HF-PCVD), radio frequency induction Ar plasma as a heat source , the Aluminium from AlCl 3 O 2 for the reaction system, the preparation of high purity , well-dispersed spherical γ - Al 2 O 3 < / sub > nanocrystals . XRD and TEM measurements showed that: the prepared γ - Al 2 O 3 better crystallization of the powder particles are spherical , the particle size range for of 20 ~~ 50 nm . Also discussed the preparation conditions on γ-Al 2 O 3 the average particle size and particle size distribution of nanoparticles . In the experiment, keeping other conditions unchanged , changing the Aluminium from AlCl 3 of the feed temperature so as to change the flow rate of the injection feed , can be realized on the γ-Al 2 O 3 nanoparticle size and its distribution regulation .

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