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The Research on the Processing of N Surface Emitting 980nm VCSEL

Author: GeDingYi
Tutor: ZhaoYingJie
School: Changchun University of Science and Technology
Course: Physical Electronics
Keywords: Vertical-cavity surface-emitting lasers Radiation bridge structure Wet etching Selective oxidation
CLC: TN248
Type: Master's thesis
Year: 2011
Downloads: 21
Quote: 0
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Abstract


The vertical cavity surface emitting laser (VCSEL) is a novel semiconductor laser, this laser has many advantages compared with conventional edge emitting lasers . The conventional VCSEL Usually is a P - surface of a light, generating a large amount of Joule heat due to the large hole effective mass of the P - surface material . Affect the performance of the device . To solve this problem , we designed and prepared the N-face out the the light Flip Chip 980nmVCSEL devices , focusing on the study of the process , including: ( 1) proposed the electrode oxide confinement structure of a new type of radiation bridge window and is designed for this purpose The photolithography version . (2) etching process is determined by comparing the experimental the etchant as of H3PO4 : H2O2: H2O = 1:1:10 phosphoric acid solution , and the average corrosion rate at 0 ℃ 0.14μm/min . (3) by an oxidation process of the gradient of the temperature and time control solves the problem of chip cracking . Finally , the device performance parameters of the test device at room temperature (22 ℃) of the threshold current is 400mA, the device at 30 ℃ lowest threshold current about 370mA ; device peak wavelength of 983.42nm , the half-peak width 0.92nm. When the injection current of 1.8A devices reached a peak power of 730mW . The photoelectric conversion efficiency was 25%; addition to the near and far -field light field test were made in the sheet and tube loading , test results, good beam quality , the uniform distribution of light intensity , beam shaping good , the far field beam with the near field beam relative almost the same angle of divergence between plus or minus 20 degrees .

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Photonics technology,laser technology > Laser technology, the maser > Laser
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