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The Design and Research of Ionization Vacuum Gauge

Author: HuangShuai
Tutor: QiaoShuang
School: Northeast Normal University
Course: Circuits and Systems
Keywords: Vacuum Measurement MCU Intelligent Control Conversion Error
CLC: TB772.3
Type: Master's thesis
Year: 2011
Downloads: 85
Quote: 0
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Abstract


With the continuous development of science and technology, vacuum technology has been widely used. Vacuum technology not only has applications in research and production, but also has application in people’s daily life. Accurate vacuum measurement and control of vacuum are very important for the success of the experiment and the quality of the products. Therefore, a variety of vacuum measuring instruments - vacuum gauge came into being. When the vacuum is (10-1 10(-5)) Pa, we use ionization vacuum gauge, It is responsive, and easy to use, it is continuous measurements which have been widely used.This paper elaborates a new-style ionization vacuum gauge. The ionization vacuum gauge uses ZJ-2 standard ionization gauge which is designed to be used in high vacuum measurement as the signaling sensor, and thus measures from 1.0×10-1Pa to 1.0×10-5Pa.The system chooses one of 16-bit microprocessor controller which is produced by surplus technology—SPCE061A as the core control chip. The weak current signal output by the ZJ-2 standard ionization gauge is sent to microcontroller after signal amplification. After a scale transformation, SPCE061A built-in ADC nonlinear error compensation and scale transformation, pressure values are real-time displayed by six digital tubes. The instrument is designed to operation buttons, key operation we can work to set the threshold of the relay. So the system can be based on the work of two thresholds to control the output relay to control molecular pump units. In addition, for SPCE061A mode-several converter nonlinearity existing problems, this paper puts forward a kind of adopting soft and hardware common nonlinear error method to eliminate, making the ADC integral nonlinear error by original +4LSB,rising to +1LSB.

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