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Design and Experiment of a Precision Positioning Stage for Nanoimprint Lithography

Author: JiaXiaoHui
Tutor: ZhangDaWei；TianYanLing
School: Tianjin University
Course: Mechanical Manufacturing and Automation
Keywords: Flexible institutions Imprint lithography Kinematic Modeling Stiffness Analysis of Kinetic analysis Error Modeling
CLC: TH702
Type: PhD thesis
Year: 2010
Downloads: 283
Quote: 1
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Abstract


In this paper, precision positioning table for nanoimprint lithography development goals, in-depth study of innovative structural design of a three translational degrees of freedom of flexible space parallel positioning mechanism, kinematic analysis, stiffness analysis Static and dynamic analysis, error modeling technology, and construction of precision positioning table prototype driven by a piezoelectric actuator. Made the following main research results: improved DELTA parallel mechanism based, will be replaced by a flexible hinge rotation pair agencies with a single degree of freedom, developed a 3 translational degrees of freedom precision positioning table. The positioning table using multiple piezoelectric ceramic actuator drive way, the initiative to adjust the end position. Using the precision positioning table is equivalent to offset pseudo-rigid model and non-bias pseudo-rigid-body model of the pseudo-rigid-body model, and homogeneous coordinate transformation method and closed-loop vector was constructed, inverse kinematics model, combined with the advantages and disadvantages of the finite element analysis and comparison of the two models, and as a follow-up analysis is based on non-bias pseudo-rigid-body model, flexible hinge allows the the corner range for constraint analysis workbench reachable workspace and workspace The maximum for the the target institutions parameter optimization design. Consider the workbench gravitational potential energy and elastic strain energy of the flexible hinge, the drive stiffness model establish branched provide the basis for the choice of the piezoelectric ceramic actuator. The follower arm parallelogram structure, discuss different constraints, the upper and lower end connected to the the beam flexibility characteristics of its output stiffness. Flexibility matrix and location of the transformation matrix combining positioning table output stiffness model, and discuss the impact of the law of the geometric parameters of the rod length, radius of the flexible hinge incision, and verified using finite element simulation. Established institutions of the static model using the principle of virtual work, the quality of each component, the effect of the flexible hinge stiffness on the position of the moving platform. The principle of virtual work and Lagrange equation method to establish the dynamic model of the organization, to discuss the quality of components, the flexible hinge stiffness of the driving torque law, combined with different trajectories, the dynamics will be based on the two methods inverse solution model comparing its effectiveness. Discuss the geometric parameters of the flexible hinge stiffness on the natural frequency of the system. Considering the theoretical modeling error, rod length error the flexible hinge machining errors, assembly errors and other sources of error in the form, and the kinematic model recursive way based positioning table full parameter error identification model and computer simulation. Finally, the use of precision positioning table prototype built, were kinematic, static stiffness and natural frequency of the test, the experimental results with theoretical models and finite element simulation model results show that the established theoretical model and theory analysis is reasonable and effective.

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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > General issues > Design, calculation and mapping
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