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Applied Study on Modulation Measurement Profilometry

Author: ShaoShuangYun
Tutor: SuXianYu
School: Sichuan University
Course: Optics
Keywords: Optical three-dimensional sensing Modulation measurement profilometry Fourier analysis Modulation Modulation depth of focus
CLC: O438
Type: PhD thesis
Year: 2004
Downloads: 375
Quote: 3
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Abstract


Optical three-dimensional sensing information optics is an important research areas, the use of three-dimensional structured illumination sensing methods, including phase measuring profilometry (Phase Measurement Profilometry, referred PMP), Fourier transform profilometry (Fourier Transform Profilometry, referred FTP), modulation measurement profilometry (Modulation Measurement Profilometry, referred MMP), in recent years has been a great attention. Modulation measurement profilometry is a subject of vertical measurement method, the height of the object surface of the object is encoded in the modulation information, a high degree of dramatic changes can be measured and the space is not a continuous surface complex objects, avoiding the principle of triangulation based on the three-dimensional sensing technology encountered shadows, occlusion and other problems. According to the different ways to obtain modulation, modulation measurement profilometry can be classified based on Fourier analysis and modulation measurement profilometry technique based on phase shift modulation measurement profilometry. Based on Fourier analysis of modulation measurement profilometry requires only a fringe figure you can get a map of modulation with phase shift technology based modulation measurement profilometry measurements compared with the faster speeds, the thesis work that is, on the basis of existing research work to further improve the modulation measurement profilometry theory, Fourier analysis of key research-based modulation measurement profilometry practical application problems. The main results are as follows: 1. Modulation depth of focus is to establish a basis for modulation measurement profilometry measurement system design methodology, the completion of the design parameters of the measuring system, established the principle of selecting measuring system hardware and the corresponding measurement system; establish a modulation depth of focus and the relationship between the precision of the system are discussed in detail affecting the precision of the system various factors. 2. Proposed modulation measurement profilometry measurement system calibration method to complete the measurement system calibration. Uh big Dr. Li Li bit abstract accurate, calibrated measuring system accuracy has improved greatly. 3. Detailed analysis and comparison of several modulation measurement profilometry height restoration algorithms, including extremes and center of gravity method, quadratic curve fitting and so on. Gaussian model, based on the characteristics of the modulation distribution curve, the design of a new high recovery algorithm - Gaussian curve fitting. This method overcomes the disadvantages of other algorithms, with higher accuracy and broader applicability. 4 the two new vertical scanning technology (adjustable raster object distance and the focal length of the grating projection system regulating the imaging plane scanned object depth range) and the video image acquisition method is applied to modulation measurement profilometry measurement system, the new measurement system has a large measurement range, measurement accuracy adjustable, small size, high degree of freedom, easy to implement instrumentation advantages. 5 for the first time detailed and complete analysis of the phase shift error and high harmonic modulation depth measurement profilometry using the characteristic polynomial method designed a pair of second harmonic and the phase shift error is not sensitive to the phase shift modulation new algorithm, called the 42 framing algorithm. This work is modulation measurement profilometry practical application basis. Key words: three-dimensional optical sensing, modulation measurement profilometry, Fourier analysis, modulation, modulation depth of focus

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CLC: > Mathematical sciences and chemical > Physics > Optics > Information Optics
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