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Investigation on Photoluminescence of Silicone Oil Treated by Fluorocarbon Plasma

Author: ChenTian
Tutor: YeChao
School: Suzhou University
Course: Plasma Physics
Keywords: silicone oil plasma treatment photoluminescence dual-frequency discharge
CLC: O539
Type: Master's thesis
Year: 2012
Downloads: 15
Quote: 0
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Development of a light source for applications in display and lighting technologiesmakes the white light emission materials to be of interest. In recent years, people find thephotoluminescence of amorphous silicon oxycarbide (a-SiCxOy) films, amorphous siliconcarbide (a-SiC:H) films and amorphous Si:C:O:H films covers the spectral range of350-800nm, it is hope that amorphous Si:C:O:H films may become one of the promisingcandidates of white light emission materials. Methods of reactive dc-magnetron sputtering,thermal vapor deposition and melt-spinning was put forward to obtain the amorphousSi:C:O:H films, but in the manufacturing process, a very high deposition or post-treatmenttemperature is needed, the temperature may up to800-1300°C. Unfortunately,the hightemperature steps are not desirable in some applications. Therefore, developing a methodto fabricate a-Si:C:O:H light emitting materials at low temperature is very important.Silicone oil is a kind of carbon-incorporated silicon oxide materials. Because of itschemical stability, silicone oil are rarely attracted as a light-emitting materials. In ourprevious work, we have found that the bonding configurations of silicone oil can bechanged directly by plasma treatment,Therefore, if we use fluorocarbon plasma to treatsilicone oil and modify its bonding configurations, The photoluminescence frompost-treated silicone oil or amorphous Si:C:O:H films may be achieved. The fabricating ofa-Si:C:O:H films at low temperature also can be achieved.This thesis studies the photoluminescence characteristics of silicone oil liquid treatedby C2F6, C4F8, O2/C2F6and CHF360MHz/2MHz dual-frequency plasma. Explores thephotoluminescence properties of silicone oil. By analysis the photoluminescencespectroscopy, infrared spectroscopy and raman spectroscopy, as well as the online emissionspectral of the discharge plasma, the possible structure association of the fluorocarbonplasma and the photoluminescence of treatment silicone oil was investigated.After thesilicone oil treated by fluorocarbon plasma, The PL spectra covering the250-600nm spectral range consist of violet412nm, blue light of469nm,482nm of glaucoma,492nmblue-green light and554nm green five peaks. The silicone oil treated by C2F6show anearly white light-emitting characteristics, while treated by C4F8showing the blue-violetlight emitting characteristics owing to the inhibition of the green emission, for the siliconeoil treated by O2/C2F6the violet and ultraviolet light-emitting enhanced while the greenemission was suppressed.while that by CHF3plasma blue, green luminescence enhanced,the violet emission was suppressed. Meanwhile, during plasma treatment the change oflow-frequency power can make the light emitting change. According to the structuralanalysis, the possible mechanisms of plasma treatment and the light of412-419nm violet468blue544-552nm green emission of silicone oil was further explored.412-419nm violetemission may attributed to the oxygen deficiency center≡Si-Si≡which is formed by thelost of CH3side chain from the Si or fracture of the Si-O-Si long chain in siliconeoil.468nm blue emission may attributed to the change of sp3C-H3、sp3C-H2、Si-C、sp2C=C and Si-CH=CH2content with the〝tail to tail〞luminescence enhanced or theradiative recombination from some direct transitions such as self-trapped excitons in thesurface of nanoclusters which is formed by the fracture of long-chain structure of siliconeoil macromolecules.544-552nmgreen emission may related to the carbon-related defects.

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