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Research on the Key Processing Factors That Influence the Machining of the Fused Silica with Reactive Atmospheric Pressure Plasma

Author: WangDongFang
Tutor: WangBo
School: Harbin Institute of Technology
Course: Mechanical Manufacturing and Automation
Keywords: Atmospheric plasma Fused Silica Removal rate Surface quality
CLC: TG664
Type: Master's thesis
Year: 2011
Downloads: 54
Quote: 0
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Abstract


Inertial confinement fusion, large astronomical telescope, microelectronics and aerospace field a variety of sophisticated weapons not only require optical components to achieve ultra-smooth surface, and a high processing efficiency requirements. Ultra-smooth surface processing for fused silica material polishing bath float polishing, magnetorheological polishing, ion beam processing, elastic emission machining. Atmospheric plasma processing is a recently developed an ultra-smooth surface processing technology, compared with other processing technologies, atmospheric plasma processing is a chemical reaction by the active particles in the plasma and the workpiece material material removal processing methods, processing efficiency, does not produce an affected layer, the surface of the component will not cause secondary damage and processing and low cost. In other countries, the technology has been applied in the manufacturing of optical components, and our research in this direction is still in its infancy, there are many problems to be solved. This thesis focuses on the process of atmospheric plasma processing of optical materials fused silica purpose of the study is to find the processing of various factors on the processing efficiency and surface quality of the fused silica investigated by theoretical and experimental. First, the paper introduces the principle of atmospheric plasma processing, the design applied to the processing of optical components atmospheric plasma generation device (plasma torch), and the operating characteristics of the device in the jet and contact two processing modes researched. Then, the paper processing efficiency (MRR) as the research object, based on two processing modes atmospheric plasma torch to the new design, the use of spectrum quantitative analysis theory and the theory of infrared temperature measurement from the the plasma spectral intensity changes and processing Process temperature fronts, research and plasma reaction gas (CF 4 and the O 2 ) content of the material removal rate. Studies have shown that the material removal rate first increased with increasing CF 4 traffic, extreme value is reached, and then reduce; the O 2 can improve the material removal rate. Subsequently affect the relationship between the input power, processing distance and processing time and material removal rate were experimental study, summed up the material removal rate increases as the input power increases, processing decreasing distance, and in a certain The basic processing time to maintain a constant regularity. Finally, the final surface quality of the workpiece as the research object, very low material removal rate on the basis of the analysis in the pre-quantum chemical theory for reducing the element surface roughness need for vision and preliminary validation experiments. Then verified by nano-indentation technique atmospheric plasma processing to remove surface affected layer, and not interested in the introduction of the workpiece surface conclusions of secondary injury. The contents of this thesis indicate that atmospheric plasma processing to improve the mechanical properties of the optical element for improving the overall performance of the optical system, which has an important significance.

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CLC: > Industrial Technology > Metallurgy and Metal Craft > Metal cutting and machine tools > Special machine tools and processing > High - speed fluid processing equipment and processing
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