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Research on Processing Technology of Fused Quartz Material with Atmospheric Plasma

Author: YuanYe
Tutor: DongShen
School: Harbin Institute of Technology
Course: Mechanical Manufacturing and Automation
Keywords: Atmospheric plasma Process parameters Fused Silica Removal function Spectrum
CLC: TG664
Type: Master's thesis
Year: 2010
Downloads: 64
Quote: 0
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Abstract


Major national science and engineering of optical parts processing efficient ultra-precision surface and sub- surface damage requirements . However , the traditional optical processing rely mainly on grinding and polishing . This processing method will be generated in the surface of the part deeper notch, and the plastic deformation of the material and the brittle failure is inevitable machining . However, chemical processing method to obtain non-destructive surface . The atmospheric plasma Polishing method of non - destructive optical surface is a use of plasma excitation of the active atoms atoms chemically react with the workpiece surface . Currently, in close connection with the subject of optical fused quartz material processing needs , is to carry out research work . Through the establishment of the processing system , the stability of the processing time , processing speed , and time linear relationship between the control and removal of function model , the ideal surface accuracy . The original system design for processing semiconductor wafers , and fused silica chemically with silicon and there are many differences , and the original discharge structure is not suitable for performing morphology processing , so the system needs to make some improvements . Generating device design through several revisions , and ultimately determine the new Ju structure , the processing speed has been improved greatly , to meet the rough finishing needs , and reduce the surface sediments . The correlation analysis also from the perspective of the physical and chemical properties of the system and spectroscopy , in theory expounded removal mechanism of atmospheric plasma processing and removal characteristics . Subsequently by the repeatability of a short period of time , the stability and the removal of a small perturbation versus time in three areas to verify the stability of the system and other related characteristics and process parameters experiments . Select the appropriate process parameters in accordance with a specific experimental program in a large number of experiments based on the experimental plan. Will eventually obtained data was subjected to finishing , using mathematical processing software to establish the removal of the functional relationship between the function of model parameters and the three process parameters , in order to guide the actual processing , and the verification test , the experimental results show that the expression more accurate description of the forecast processing effect .

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CLC: > Industrial Technology > Metallurgy and Metal Craft > Metal cutting and machine tools > Special machine tools and processing > High - speed fluid processing equipment and processing
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