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Research on Signal Processing System of Laser Interferometer and Control System of Nano-Measuring Machine

Author: LaiZhan
Tutor: ShaoHongWei
School: China Institute of Metrology
Course: Measuring Technology and Instruments
Keywords: Nanometrology Traceability Laser interferometer Signal processing system Control system Error Correction CPLD
CLC: TH721
Type: Master's thesis
Year: 2011
Downloads: 50
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Abstract


With the enhancement of our overall economic capacity and capability of independent innovation, the the nanomaterials, integrated circuits, super finishing, MEMS (micro-electro-mechanical systems), the rapid development of high-tech industries are related to nanotechnology, there is an urgent need to be measured by nano-nano scale standards and traceability. The research group developed a wide range of nanometer geometry Basis of measurement device (also known as nano-measuring machine) will serve as China's large-scale nano money transfer system of traceability benchmark to ensure the reunification of China's nano-money. The main content of the papers for a wide range of nanometer geometry Basis of measurement device, design and realization of measurement and control systems, and signal processing system is divided into a laser interferometer with nanometer measurement control system. The summarized main content and results of the full text, the following aspects: 1. Analysis of a wide range of nano-geometry measurement part of the reference device, design a measurement and control system of the computer processor plus dual DSP (digital signal processor), respectively I-DSP processor for laser interferometer signal processing and nano-measuring machine probe and displacement system used to control the Z-DSP processor. The innovative design of DSP as the data processing and control core, the stack bus transmission signal, CPLD (complex programmable logic device) as a logic control core infrastructure. 2. Expounded the principle of laser polarization interferometer, and can improve the measurement resolution times process optical path and phase electronic segments law. Analysis interferometer sources of error and error correction technology, error correction algorithm based on harmonic separation and phase segment architecture was designed and implemented. Innovative design of the subdivision the dividing algorithm based on the shift of CPLD hardware look-up table to complete the laser interferometer signal error correction and phase. 3. Designed and implemented the interferometer signal processing circuit, comprising: a photoelectric conversion circuit, the interferometer signal conditioning circuit interferometer signal acquisition circuit based on CPLD CPLD-based the interferometer error correction and phase subdivision circuit. 4. Nano-measuring machine control system was designed and implemented. Poll to control multiple drives and nano-measuring machine probe. Board options - chip select - low configuration Sequence Spread from the peak of the address space to a low address space allocation method for each dual DSP processor interface assigned address space. Design and communication of data to CPLD the communication logic control core communication board, completed high-speed IO board DSP with the host computer communication, CPLD is communication with the PIO (parallel input and output ports) with RS232 communication with GIO (General Purpose Input Output) communications, data and commands to provide high-speed, reliable, stable transmission channel. 5. Verified by experiments interferometer photoelectric conversion, signal conditioning, data acquisition, reliability and accuracy, and to verify the good results of the CPLD-based sliding filter to reduce the noise impact. Testing, validation DSP communication with the host computer high-speed IO board, CPLD communication stability and reliability.

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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > Coordinates,computer tools,the counter > Coordinates and automatically coordinates
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