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Vibration Analysis and Trajectory Control for Wafer Transfer Robot

Author: XuGuoBao
Tutor: LiuYanJie
School: Harbin Institute of Technology
Course: Mechanical and Electronic Engineering
Keywords: Wafer transfer robot Dynamics Modeling Vibration Analysis Trajectory planning
CLC: TP242.2
Type: Master's thesis
Year: 2011
Downloads: 46
Quote: 0
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Abstract


A . The rapid development of IC manufacturing equipment industry require high-speed wafer transfer robot movement, thereby increasing the impact of robot motion the process of its supporting frame . On the other hand , the IC production line of the particularity of vibration higher requirements. For the impact of the wafer transfer robot high-speed movement of its supporting frame , combined with the major projects of the National Science and Technology - for lithography machine silicon transfer the robot key technologies and prototype development (Project No. 2009ZX02012 - 002) , the topic in-depth discussion of the various factors affect the robot vibration , and two angles from the robot structure and trajectory control to reduce vibration . First, according to the robot structure and transmission principle , taking into account the flexible the harmonic reducer and timing belt , respectively to add torsion spring in the T-axis and R - axis , five degrees of freedom \. Derived kinematic equations and dynamic equations , using MATLAB software to write the kinetic formula . ADAMS simulation software to create a virtual prototype , the input parameters of motor sports , as an indicator to the output of the joint force / torque curve , comparing the calculation results of ADAMS and MATLAB , to verify the correctness of the model , and to assess the scope of application of the model . With the established model of robot structure and motor sports robot vibration . According to the simulation results to optimize the structure of the robot arm ; analysis of the T -axis and R - axis robot vibration motor in accordance with the movement of different velocity curves , and provide the basis for the trajectory planning . On the basis of the analysis of the vibration of the end of the robot manipulator trajectory planning . Given two paths under three trajectory control algorithm , no interpolation motion interpolation movement and timing interpolation movement of fixed step three trajectory control strategy robot vibration analysis vibration reasons for the differences . Last experimental system hardware circuit structures , preparation of motor debug interface , the conclusion trajectory control . The experiments show that the robot vibration motor in accordance with the timing interpolation movement smallest; vibrations meet the technical specifications of three robot trajectory control strategy , and compared with the non - interpolated motion , two - axis interpolation method can significantly reduce robot vibration .

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CLC: > Industrial Technology > Automation technology,computer technology > Automation technology and equipment > Robotics > Robot > Industrial robots
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