Dissertation > Excellent graduate degree dissertation topics show

The Fabrication and Characterization of ZnO-Based Films and UV Photodetectors

Author: ZhaoYaJun
Tutor: JiangDaYong
School: Changchun University of Science and Technology
Course: Materials Science
Keywords: RF magnetron sputtering ZnO/ZnMgO films MSM structureUV photodetectors
CLC:
Type: Master's thesis
Year: 2014
Downloads: 3
Quote: 0
Read: Download Dissertation

Abstract


The band gap energy of ZnMgO can be controlled from3.3eV to7.8eV at room temperature. Because of widely distributed, multi-preparation methods and strong anti-radiation for the ZnMgO semiconductor, therefore, people are increasingly concerned about the ZnMgO in recent years.In this paper, ZnO films and ZnMgO alloy films were prepared by RF(radio-frequency) magnetron sputtering technology. Au was selected as the contact metal and the ZnO and ZnMgO ultraviolet(UV) photodetectors of clear-cut MSM (metal-semiconductor-metal) structure with interdigitated configuration were obtained by lithography and wet etching. In our work, the quality of ZnO and ZnMgO films was influenced by technological conditions of RF magnetron sputtering technology, and we studied that the film properties were affected by sputtering power. After photolithography, we studied surface morphology and optical properties of ultraviolet photodetectors. In addition, we studied principle, which the surface treatment improved the performance of the detector.

Related Dissertations

  1. LSGM electrolyte thin films and electrochemical properties of,TM911.4
  2. Preparation and Characterization of SiC Films and Nanowires,TB383.2
  3. Regenerated cellulose fluorocarbon film on the substrate morphology, structure and properties of,TB383.2
  4. Growth and Properties of La0.5Sr0.5CoO3/Pb(Zr0.52Ti0.48 O3/La0.5Sr0.5CoO3 Integreted Ferroelectric Thin Films,O484.1
  5. Preparation and Characteristic of BiFeO3 /Bi3.25 La 0.75 Ti3O12 Multiferroic Bi-layer Films,O484.4
  6. Study on Preparation and Properties of P-type ZnMgO:In-N Film,O484.4
  7. A1N buffer layer prepared by magnetron sputtering and properties of ZnO films,O484.1
  8. Preparation and Property-research of BiFeO3 Ceramics and Thin Solid Films,O484.1
  9. RF magnetron sputtering of nitrogen -doped ZnO thin films and its properties,O484.1
  10. The Theoretical Study and Numerical Simulation of the Tunable Two-dimensional Hexagonal Phase Array Based on Talbot Effect,TH74
  11. Study of Structure and Optical Properties of Aldoped ZnO Nanofilms Prepared in different Ar/O2 and Sputtering Power,O614.241
  12. The Deposition and Research of Multi-layout Films in BN/diamond to Fabricate SAW Device,O484.1
  13. Media Used ferroelectric phase shift Performance Optimization,TN623
  14. Preparation and Properties of SiC/SiO2 Nanometer Composite Thin Films and Low-dimensional ZnO Nanometer Structures,TN304.05
  15. Preparation and Characterization of Hydroxyfluorapatite Coatings Deposited by Radio Frequency Magnetron Sputtering,TG174.444
  16. Preparation and Study of Hydroxyapatite/ β-Tricalcium Phosphate Coatings Deposited by Radio Frequency Magentron Sputtering,R318.08
  17. Preparation and Properties of CuO/SiO2 Nanometer Composite Thin Filmes,TN304.055
  18. The Synthesis of One-dimensional GaN Nano Structures and Crystal Films with Two Steps Growth Pattern,TN304
  19. Study on the Alumina Thin Flim Fabrication on Steel,TG174.4
  20. Design of High Voltage Pulse Power for Anodic Bonding and Study on the Processing Property of Bonding,TN86
  21. A Study on Preparation, Structure and Physical Property of ZnO:Mn DMS and P-type ZnO:N Films,TN304.21

CLC: >
© 2012 www.DissertationTopic.Net  Mobile