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Deposition and Characteristics of ZnO Film by Ultrasonic Spray Pyrolysis Method
Author: WangShiKai
Tutor: JiangZuoYan
School: Dalian University of Technology
Course: Materials Science
Keywords: ZnO film ultrasonic spray pyrolysis(USP) crystal structure morphology visible light transmittance
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Type: Master's thesis
Year: 2011
Downloads: 5
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Abstract
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In this paper,the basic properties and applications of ZnO thin films are introduced,andthe various growth techniques, its theory and the up-to-date progresses in the research aboutZnO thin films are reviewed. We paid special attention to its potential application in energysaving coating glasses and thin-film solar cells with textured structure.ZnO thin films were grown on the heated glass substrate by ultrasonic spray pyrolysismethod, zinc nitrate solution was used as the precursor material. The X-ray Diffraction (XRD),Scanning Electron Microscopy (SEM) and UV-Vis Spectrometer were employed to analyzethe crystal structure,morphology and optical property of the thin films. The effects of growsparameters on quality of ZnO thin films,such as precursor solutions concentration, substratetemperature deposition time and armealing schedule are discussed. The results show that thesubstrate temperature solution concentration and armealing temperature play a critical role inthe film deposition. Samples that prepared from0.3M precursor solutions have the densesmooth and homogenous structure and exihibit the preferential orientation of (002) to thesubstrate surface when deposited in the temperature around500℃with one hour armealingtreatment at the temperature of500℃. The optical tests of these thin films shows that thedense smooth and homogenous microstructure also have a positive effect on the film visiablelight transmitance performances. The films grown in the above condition could reach thevisible light transmittance as high as90%.But when the films are annealed at600℃, theyhave the highest preferential orientation of (002) to the substrate surface while the visiblelight transmittance declines to80%,perhaps due to the increase of the oxygen vacancies.
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