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As the development of MEMS (Micro Electro Mechanical System), Micro powerbecome a key problem in MEMS application gradually. Conventional micro power can notmeet the energy requirement of MEMS because of restrict of volume, life-time, adaptation forenvironment, integration, and so son. Radioisotope Micro Batttery based on piezoelectriceffect has the characteristics of little volume, sample structure, high stability, long life-time,high density of energy, robust, and so on, more importantly, in the course of application, itdoes not need frequently to supply materials or energy for them, thus become of the researchdirection of micro power. Energy convert structure of the Radioisotope Micro Batteryseriously, thus it important to improve the efficiency of the energy convert structure.In this thesis, A radioisotope power generator with a potential lifetime of decades isdemonstrated by employing a100.3-year half-lifetime63Ni radioisotope thin-film source toelectrostatically actuate and cause reciprocation in a microfabricated piezoelectric unimorphcantilever has been introduced.Firstly, the structure and work principle of Radioisotope Micro Battery are introduced,including the sort of Radioistope Micro Battery, the generation, accumulation of β eletric.Secondly, The structure of the energy conversion isotope batteries has been theoreticalanalysised. According to the mathematic model proposed in this paper, the performance ofthese energy harvesters have been simulated by MALAB/SIMULINK.For the proposal MEMS micro battery, a complete MEMS process flow to fabaricate theenergy harvester especially piezoelectric thin film is presented.
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